A Cr-N thin film displacement sensor for precision positioning of a micro-stage

Measurement technologies for precision positioning

“…New materials have been applied to improve the resolution of the strain gauge. A resolution in the order of 1 nm (rms) has been achieved over a range of 2 mm with a sensor bandwidth of 100 Hz by using a Cr-N thin film strain gauge sensor [168]. The Cr-N thin film strain gauge can be directly deposited on the leaf spring, which is used as the support and guideway of the stage.…”

A linear actuator for precision positioning of dual objects

“…Based on the principle of IDM and SIDM [8][9][10][11][12][13][14][15][16][17], a long stroke can be achieved when a saw-tooth voltage is applied to the PZT. As shown in figure 1(b), when the voltage is driven with slow increase and rapid decrease, the PZT can slowly expand and quickly shrink, respectively.…”

“…As shown in figure 1(b), when the voltage is driven with slow increase and rapid decrease, the PZT can slowly expand and quickly shrink, respectively. In the proposed actuator, the object 1 is driven based on the principle of IDM [8][9][10][11], and the object 2 is driven based on the principle of SIDM [12][13][14][15][16][17]. By changing the on-off control of the electromagnet, the operation modes of IDM and SIDM can be alternated correspondingly.…”

“…On the other hand, a piezoelectric element (PZT) is one of the most well-used actuators for miniaturization because of its small size, fast response, high resolution and relatively large force output [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. To overcome the limited stroke of a PZT, many mechanisms have been designed for long stroke positioning by enlarging the extremely small displacement of the PZT.…”

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

“…The most straightforward method for specifying the position of a target in a plane or in 3D space based on the multi-axis Cartesian coordinate system is to employ orthogonally placed multiple linear displacement sensors such as laser interferometers [6,7] and/or linear encoders [8,9]. Capacitive displacement sensors [10], high-precision strain gauges [11,12] and fiber sensors [13] can also be employed when the required measurement range is up to several-tens of micrometers.…”