2020
DOI: 10.3390/mi11070704
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A Customized Two Photon Fluorescence Imaging Probe Based on 2D scanning MEMS Mirror Including Electrothermal Two-Level-Ladder Dual S-Shaped Actuators

Abstract: We report the design and characterization of a two-photon fluorescence imaging miniature probe. This customized two-axis scanning probe is dedicated for intraoperative two-photon fluorescence imaging endomicroscopic use and is based on a micro-electro-mechanical system (MEMS) mirror with a high reflectivity plate and two-level-ladder double S-shaped electrothermal bimorph actuators. The fully assembled probe has a total outer diameter of 4 mm including all elements. With a two-lens configuration and a small ap… Show more

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Cited by 5 publications
(8 citation statements)
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References 31 publications
(78 reference statements)
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“…For that, a customized endoscopic handheld imaging probe head, dedicated to intraoperative use, is under development. This imaging probe head consists of a miniature scanning system based on an electrothermally actuated microelectromechanical system (MEMS) mirror and has already been characterized to be utilized for in vivo imaging essay ( 55 ).…”
Section: Discussionmentioning
confidence: 99%
“…For that, a customized endoscopic handheld imaging probe head, dedicated to intraoperative use, is under development. This imaging probe head consists of a miniature scanning system based on an electrothermally actuated microelectromechanical system (MEMS) mirror and has already been characterized to be utilized for in vivo imaging essay ( 55 ).…”
Section: Discussionmentioning
confidence: 99%
“…More technical detailed information (pulse duration, pulse compression system, endoscopic fiber) about this endomicroscope characteristics are already published in previous works of our team 38 , 39 . In addition, a handheld miniature imaging probe head is under development and presented in a previous work 40 , and it will be coupled with this endomicroscope, to ensure in-vivo image acquisitions.…”
Section: Discussionmentioning
confidence: 99%
“…A thermal bimorph is a cantilever beam that consists of two or more layers of materials with different coefficients of thermal expansion (CTE). Electrothermal bimorph MEMS mirrors can generate large forces and displacements at low voltages (e.g., less than 10 V), which is ideal for biomedical applications, and they have been implemented in miniature imaging systems, e.g., miniature OCT probes [ 75 ], optical scanning [ 76 ], and TPM probes [ 28 , 77 ].…”
Section: Mems-based Tpmmentioning
confidence: 99%
“…Singh et al developed a MEMS mirror based on Al/Si bimorph actuators and achieved scanning angles up to 17° with voltages less than 2 V and power less than 50 mW [ 79 ]. Compared to Al/Si materials, Al and SiO 2 have a larger CTE difference, so Al/SiO 2 bimorph electrothermal MEMS mirrors are expected to have a larger scan range, and several Al/SiO 2 bimorph electrothermal MEMS mirrors have been developed [ 75 , 77 , 80 , 81 , 82 ]. In 2006, Fu et al first applied an electrothermal bimorph 1D MEMS mirror in endoscopic TPM imaging, where the packaged probe was 3 mm in diameter [ 28 ], as shown in Figure 11 a.…”
Section: Mems-based Tpmmentioning
confidence: 99%
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