A deep sub-wavelength process for the formation of highly uniform arrays of nanoholes and nanopillars

Wu, Wei; Katsnelson, A.; Memiş, Ömer Gökalp; Mohseni, Hooman

doi:10.1088/0957-4484/18/48/485302

Cited by 176 publications

(111 citation statements)

References 22 publications

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“…When the incident light is scattered by a homogenous single dielectric sphere, a tightly focused beam with a subwavelength waist emerges on the shadow side of the sphere. The nanojet has potential applications in nanoparticle sensing [2], subwavelength nanopatterning and nanolithography [3,4], and the realization of a low-loss coupled resonator optical waveguide [5,6]. For all applications, it is desired that the nanojets extend as far as possible in the forward direction.…”

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confidence: 99%

Ultralong photonic nanojet formed by a two-layer dielectric microsphere

2014

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A photonic nanojet is a highly focused optical beam with a subwavelength waist on the shadow side of the sphere. Successful far-field applications require long nanojets that extend afar. Using the exact Mie theory, we show that ultralong nanojets can be generated using a simple two-layer microsphere structure, using conventional optical materials that are readily available. In particular, we show that for a glass-based two-layer microsphere, the nanojet has an extension of 22 wavelengths. We also show that long nanojets can be formed using semiconductors at infrared frequencies in free space.

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confidence: 99%

Ultralong photonic nanojet formed by a two-layer dielectric microsphere

2014

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“…It has been demonstrated that microspheres on sample material can decrease the laser direct-etching, especially if the ultrafast (pico-or femto-seconds) lasers or shorter wavelength (ultra-violet range) lasers [7][8][9][10][11][12][13]. This decreasing size potency also has been demonstrated for nanosecond pulsed near-infrared lasers [14,15] that considered as more economical option than ultrafast pulsed ultra-violet lasers -not to mention its availability in well-packaged source.…”

Section: Introduction: Photonic Jet Etching Using Microspheresmentioning

confidence: 98%

Photonic jet etching: Justifying the shape of optical fiber tip

Abdurrochman

Zelgowski

Lecler

et al. 2016

AIP Conference Proceedings

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Abstract. Photonic jet (PJ) is a low diverging and highly concentrated beam in the shadow side of dielectric particle (cylinder or sphere). The concentration can be more than 200 times higher than the incidence wave. It is a non-resonance phenomenon in the near-field can propagate in a few wavelengths. Many potential applications have been proposed, including PJ etching. Hence, a guided-beam is considered increasing the PJ mobility control. While the others used a combination of classical optical fibers and spheres, we are concerned on a classical optical fiber with spherical tip to generate the PJ. This PJ driven waveguide has been realized using Gaussian mode beam inside the core. It has different variable parameters compared to classical PJ, which will be discussed in correlation with the etching demonstrations. The parameters dependency between the tip and PJ properties are complex; and theoretical aspect of this interaction will be exposed to justify the shape of our tip and optical fiber used in our demonstrations. Methods to achieve such a needed optical fiber tip will also be described. Finally the ability to generate PJ out of the shaped optical fiber will be experimentally demonstrated and the potential applications for material processing will be exposed.

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“…Many people have already attempted applying the photonic jets for marking or surface patterning. However, most of them consider pico/femto-second or ultraviolet lasers [30][31][32][33][34][35][36][37][38][39].…”

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confidence: 99%

“…The photonic jets allow high concentration of light intensity with factor from 20 to more than 200 [29,32,33]. This factor can allow lower power laser, like nanosecond infrared lasers, to process materials with low absorbance.…”

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confidence: 99%

Photonic jets for micro-etching

Abdurrochman¹,

Lecler²,

Mermet³

et al. 2014

Proceedings of the 2014 International Conference on Physics

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Abstract-Photonic jet is a localized sub-wavelength beam generated at the shadow-side surfaces of microscale dielectric cylinders or spheres, when they are illuminated by an electromagnetic wave. We demonstrate the potential of the photonic jets for micro-etching using a nanosecond Near-IR laser (= 1064 nm) that has a typical spatial resolution around 70 µm, limited by its optical focusing head. Combining this laser with micro-scale glass (n s = 1.5) and BaTiO 3 spheres (n s = 1.9) to achieve photonic jets, we can etch two substrates: silicon wafers, which have a significant absorption at 1064 nm, and glass plates, which have a lower absorption at this wavelength. The smallest marks achieved on silicon have an average diameter of 1.3 µm which is 50 times smaller than without spheres. Despite the low absorption, micrometric etchings have also been achieved on glass.

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A deep sub-wavelength process for the formation of highly uniform arrays of nanoholes and nanopillars

Cited by 176 publications

References 22 publications

Ultralong photonic nanojet formed by a two-layer dielectric microsphere

Ultralong photonic nanojet formed by a two-layer dielectric microsphere

Photonic jet etching: Justifying the shape of optical fiber tip

Photonic jets for micro-etching

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