Volume 7: Fluid Flow, Heat Transfer and Thermal Systems, Parts a and B 2010
DOI: 10.1115/imece2010-39269
|View full text |Cite
|
Sign up to set email alerts
|

A Dielectric Liquid Contact Thermal Switch With Electrowetting Actuation

Abstract: In this paper we present the design, fabrication, and preliminary characterization of a MEMS thermal switch. The thermal switch operates by changing the conductive path between two silicon die by moving a dielectric liquid, such as glycerin or water, using electrowetting. The result is a bi-stable thermal switch that can change between a low thermal resistance state and a high thermal resistance state. Preliminary measurements show the switching time to be on the order of a second. Numerical modeling indicates… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4

Citation Types

1
6
0

Year Published

2017
2017
2022
2022

Publication Types

Select...
5
1

Relationship

0
6

Authors

Journals

citations
Cited by 6 publications
(7 citation statements)
references
References 0 publications
1
6
0
Order By: Relevance
“…In particular, liquid metal microdroplets with a symmetrical spatial structure are useful in developing novel microfluidics engineering devices, advanced functional electronics. In addition, the liquid metal microdroplets with highly monodispersity possess tremendous application potentials in various fields of microfluics actuators, periodic structures and optics devices, for instance, microswitches [10][11][12], micropumps [13], micromixer [14], self-powered acceleration sensor [15], radio frequency resonators [16] and reconfigurable optical diffraction gratings [17][18][19]. Therefore, the fabrication of liquid metal droplets with uniform size is of great significance.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, liquid metal microdroplets with a symmetrical spatial structure are useful in developing novel microfluidics engineering devices, advanced functional electronics. In addition, the liquid metal microdroplets with highly monodispersity possess tremendous application potentials in various fields of microfluics actuators, periodic structures and optics devices, for instance, microswitches [10][11][12], micropumps [13], micromixer [14], self-powered acceleration sensor [15], radio frequency resonators [16] and reconfigurable optical diffraction gratings [17][18][19]. Therefore, the fabrication of liquid metal droplets with uniform size is of great significance.…”
Section: Introductionmentioning
confidence: 99%
“…Various thermal switch technologies have been studied in the literature including mechanical control of the contact between two surfaces [3], the phase transition of VO 2 between electrical conductor and insulator [4], the use of liquid-vapor phase transition of working fluid [5], and electrowetting of liquid [6][7][8][9]. Nonetheless, the devices are desired to be simple without any moving parts and should be able to control the flow of heat at any temperature to have precise and long-term thermal management for an effective heat recovery.…”
Section: Introductionmentioning
confidence: 99%
“…In this regard, thermal switches, which alter thermal conductance between ON and OFF states, have attracted considerable attention. In current technologies based on microfabrication, thermal switches are mainly achieved by connecting and breaking two surfaces with the motion of liquid droplets 8 10 or solid membranes actuated with electric field 11 or piezoelectric motors 12 . However, these non-monolithic approaches with moving parts often suffer from one or more of the following limitations: materials instability and toxicity, scalability, poor integrability with other devices, low ON/OFF ratio, low speed, and high energy consumption.…”
Section: Introductionmentioning
confidence: 99%