2019
DOI: 10.1557/jmr.2019.357
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A diffusion approach for plasma synthesis of superhard tantalum borides

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Cited by 3 publications
(2 citation statements)
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“…Reactant gases for the growth of the boron carbide coatings include H 2 and B 2 H 6 , but little is known of the plasma species and underlying the spectroscopic aspects responsible for boron carbide growth in its various structural forms. Investigation of the excited state plasma species from optical emission spectroscopy in our MPCVD system shows that emission from atomic boron is highest at low chamber pressure and high microwave power [ 25 , 26 ]. Copious amounts of atomic boron in the plasma may be beneficial under some growth conditions for producing high hardness boron-rich carbides, such as B 50 C 2 , B 50 C, B 48 C 3 , B 51 C, B 49 C 3 , or many other forms of boron-rich carbide.…”
Section: Introductionmentioning
confidence: 99%
“…Reactant gases for the growth of the boron carbide coatings include H 2 and B 2 H 6 , but little is known of the plasma species and underlying the spectroscopic aspects responsible for boron carbide growth in its various structural forms. Investigation of the excited state plasma species from optical emission spectroscopy in our MPCVD system shows that emission from atomic boron is highest at low chamber pressure and high microwave power [ 25 , 26 ]. Copious amounts of atomic boron in the plasma may be beneficial under some growth conditions for producing high hardness boron-rich carbides, such as B 50 C 2 , B 50 C, B 48 C 3 , B 51 C, B 49 C 3 , or many other forms of boron-rich carbide.…”
Section: Introductionmentioning
confidence: 99%
“…With recent efforts in developing liquid lithium and tungsten PFCs (such as the wall materials projected for use in ITER), the simulation framework developed in this study can provide a starting point for understanding bombardment processes in those systems. Furthermore, plasma deposition of boron has been used to create hard coatings for metals, thus the current work has potential for improving understanding of surface modification with boron even beyond fusion device development [29][30][31].…”
Section: Discussionmentioning
confidence: 99%