A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control

Li, Cheng; Yang, Bo; Guo, Xiaonong; Wu, Lei

doi:10.3390/mi10080496

Cited by 12 publications

(11 citation statements)

References 28 publications

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“…In order to verify these characteristics of the MEMS gyroscope, an open-loop frequency sweep test on the front-end analog circuit was carried out, as shown in [2]. The excitation signal with a fixed amplitude (100 mV) and a linearly increasing frequency (13,408 Hz; 0.05 Hz) was generated by FPGA programming, and the amplitude and phase response under each excitation were automatically collected.…”

Section: Real-time Circuit Phase Delay Correction Systemmentioning

confidence: 99%

“…Micro-electromechanical system (MEMS) gyroscopes, measuring the angular rate motion based on the Coriolis effect [ 1 ], have been widely adopted for industrial and consumer applications [ 2 , 3 ] for their small size, high integration, low cost, and low power consumption. With the rapid development of electronic techniques, the performance of MEMS gyroscopes has been considerably improved, bringing a new future for potential military applications [ 4 , 5 , 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

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A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Wei

Guo

et al. 2021

Micromachines

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With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system has become a key point to determine their internal performance. Nevertheless, the phase delay of electronic components may result in some serious hazards. This study described a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis was provided to clarify the influence of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and the zero-rate output (ZRO) utilizing a force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between the amplitude-frequency, the phase-frequency of the MEMS gyroscope, and the phase relationship of the whole control loop, a real-time correction system was proposed to automatically adjust the phase reference value of the phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results showed that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO was decreased by 755% to 0.095°/s. This correction system realized a small angle random walk of 0.978°/√h and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. The thermal drift of the ZRO was reduced to 0.0034°/s/°C at a temperature range from −20 to 70 °C.

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Section: Real-time Circuit Phase Delay Correction Systemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Wei

Guo

et al. 2021

Micromachines

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“…From the radiation source, the optical signal passes the structure "prism-medium-simulator of a part of the edge of a ring resonator" through an optical fiber. Under the action of the voltage of the wave generator, the magnitude of the nano-displacement of the piezoelectric transducer changes: y = k PT •U WG , where k PT -coefficient of piezoelectric transducer, U WG -voltage of wave generator [12][13][14][15][16][17].…”

Section: Investigation Of the Characteristics Of The Module Based On mentioning

confidence: 99%

Experimental investigation of the characteristics of the information sensing module based on the optical tunneling effect of the angular velocity transducer by using a piezoelectric module

Busurin¹,

Kazaryan²,

Win³

et al. 2019

Instrumentation Engineering, Electronics and Telecommunications

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This article presents an experimental investigation of the characteristics of the module based on the optical tunneling effect, which provides information on the nano displacements resonator of the angular velocity transducer. The analysis of the sensitivity of the module based on the optical tunneling effect with increasing amplitude of forced displacements excited by a piezoelectric module is produced. The principle of operation of the module based on the optical tunneling effect, which is based on the dependence of the reflection coefficient of the radiation source structure "medium-gapmedium" on the size of the gap, is determined. The transfer function of the piezoelectric transducer based on the optical tunneling effect with the total optical losses is determined. The theoretical investigation of the transfer function based on the tunneling effect using the module "optical prism-medium-surface simulator of the edge of the ring resonator" is carried out. The results of the experimental investigation are confirmed that when the amplitudes of the input voltages increase, asymmetric amplitudes of the positive and negative half-waves of the output voltages of the module based on the optical tunneling effect are formed. The scheme of the experimental investigation of the transfer function of the module based on the optical tunneling effect, providing the implementation of optical information retrieval in the measurement of angular velocity, is described. The results of the experimental investigation of the optical information sensing unit at different signals of the wave generator show a good agreement with the theoretical model of the module based on the optical tunneling effect and a small change in sensitivity with increasing the angular velocity and amplitude of the displacement of the resonator edge simulator, which should be compensated for the formation of the output signal.

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“…With the development of designing and manufacturing techniques, microelectromechanical system (MEMS) gyroscopes have been widely adopted in the fields of consumer and industrial applications for their low cost, facile integration and low power consumption [ 1 , 2 , 3 ]. Tuning fork gyroscopes (TFGs), composed of a decoupled geometry framework and two identical single-mass structures, have been attracting much attention due to their inherent common-mode suppression ability, high vibration immunity near the operating frequency and insensitivity to external accelerations [ 4 , 5 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

et al. 2021

Sensors

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Tuning fork gyroscopes (TFGs) are promising for potential high-precision applications. This work proposes and experimentally demonstrates a novel high-Q dual-mass tuning fork microelectromechanical system (MEMS) gyroscope utilizing three-dimensional (3D) packaging techniques. Except for two symmetrically decoupled proof masses (PM) with synchronization structures, a symmetrically decoupled lever structure is designed to force the antiparallel, antiphase drive mode motion and eliminate low frequency spurious modes. Thermoelastic damping (TED) and anchor loss are greatly reduced by the linearly coupled, momentum- and torque-balanced antiphase sense mode. Moreover, a novel 3D packaging technique is used to realize high Q-factors. A composite substrate encapsulation cap, fabricated by through-silicon-via (TSV) and glass-in-silicon (GIS) reflow processes, is anodically bonded to the wafer-scale sensing structures. A self-developed control circuit is adopted to realize loop control and characterize gyroscope performances. It is shown that a high-reliability electrical connection, together with a high air impermeability package, can be fulfilled with this 3D packaging technique. Furthermore, the Q-factors of the drive and sense modes reach up to 51,947 and 49,249, respectively. This TFG realizes a wide measurement range of ±1800 °/s and a high resolution of 0.1°/s with a scale factor nonlinearity of 720 ppm after automatic mode matching. In addition, long-term zero-rate output (ZRO) drift can be effectively suppressed by temperature compensation, inducing a small angle random walk (ARW) of 0.923°/√h and a low bias instability (BI) of 9.270°/h.

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A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching Control

Cited by 12 publications

References 28 publications

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Experimental investigation of the characteristics of the information sensing module based on the optical tunneling effect of the angular velocity transducer by using a piezoelectric module

A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

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