A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end

Self Cite

In this paper, a detailed analysis of the influence of phase noise on the micro-electro-mechanical system (MEMS) disk resonator gyroscope (DRG) is presented. Firstly, a new time-varying phase noise model for the gyroscope is established, which explains how the drive loop circuit noise converts into phase noise. Different from previous works, the time-varying phase noise model in this paper is established in mechanical domain, which gain more physical insight into the origin of the phase noise in gyroscope. Furthermore, the impact of phase noise on DRG is derived, which shows how the phase noise affects angular velocity measurement. The analysis shows that, in MEMS DRG, the phase noise, together with other non-ideal factors such as direct excitation of secondary resonator, may cause a low frequency noise in the output of the gyroscope system and affect the bias stability of the gyroscope. Finally, numerical simulations and experiment tests are designed to prove the theories above.

Section: Resultsmentioning

confidence: 99%

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Zhang

Chen

Yin

et al. 2020

Self Cite

“…In 2020, Ju et al reported an auto-tuning continuous-time BPSDM for capacitance signal detection of MEMS gyroscopes [ 8 ]. Similar interface circuits [ 2 , 9 , 10 ] differ mainly in C/V converter and ADC. In the field of inertial measurement, interface ASIC based on capacitance detection continue to improve performance in terms of noise floor, dynamic range, and signal-to-noise ratio.…”

Section: Introductionmentioning

confidence: 99%

“…Implementing signal processing algorithms on a Field Programmable Gate Array (FPGA) at the circuit level can solve the above problems and become a mainstream solution. In related works [ 7 , 10 , 13 , 14 , 15 , 16 ], the researchers reported their cases of signal measurement and control based on FPGA in the field of inertial measurement. When the digital signal processing circuits are designed and manufactured using integrated circuit technology, it can obtain performance beyond the FPGA solutions, which are also reported in some products [ 12 , 17 ].…”

Section: Introductionmentioning

confidence: 99%

A Digital-Analog Hybrid System-on-Chip for Capacitive Sensor Measurement and Control

Gao

Zhou

et al. 2021

Sensors based on capacitance detection are common in the field of inertial measurement and have the potential for miniaturization and low power consumption. In order to control and process such sensors, a novel digital-analog hybrid system-on-chip (SoC) is designed and implemented. The system includes a capacitor to voltage (C/V) conversion circuit and a band-pass sigma-delta modulator (BPSDM) as the analog-to-digital converter (ADC). The digital signal is processed by the dedicated circuit module based on the least mean square error demodulation (LMSD) algorithm on the chip. The low-power Cortex-M3 processor supports software implementation of control algorithms and circuit parameter configuration. The control signal is output through a digital BPSDM. The chip was taped out under SMIC 180 nm Complementary Metal Oxide Semiconductor (CMOS) technology and tested for performance. The result shows that the maximum operating frequency of the chip is 105 MHz. The total area is 77.43 mm2. When the system clock is set to 51.2 MHz, the static power consumption and dynamic power consumption of the digital system are 18 mW and 54 mW respectively.

“…With the continuous improvement of performance, it will excel in high-end applications such as navigation, defense, aviation and aerospace [ 1 , 2 ]. Recently, high performance gyros such as the frame type [ 3 , 4 , 5 , 6 , 7 ], the disc type [ 8 , 9 , 10 , 11 , 12 ], the butterfly [ 13 , 14 , 15 , 16 , 17 , 18 , 19 ], etc. have attracted a lot of attention from academia and industry.…”

Section: Introductionmentioning

confidence: 99%

Design of Readout Circuit with Quadrature Error and Auxiliary PLL for MEMS Vibratory Gyroscope

Chen

Zhong

2020

Traditional MEMS gyroscope readout eliminates quadrature error and relies on the phase relationship between the drive displacement and the Coriolis position to accomplish a coherent demodulation. This scheme shows some risk, especially for a mode-matching gyro. If only a slight resonant frequency deviation between the drive and sense mode occurs, a dramatic change in the phase relationship follows, which leads to a wrong demodulation. To solve this, this paper proposes a new readout based on the quadrature error and an auxiliary phase-locked loop (PLL). By tuning the phase shifter in the sense-mode circuit, letting the quadrature error and the carrier of the mixer be in 90° phase alignment, the Coriolis was simultaneously in phase with the carrier. Hence, the demodulation was accomplished. The carrier comes from the PLL output of the drive-mode circuit due to its low jitter and independence of the work mode of the gyro. Moreover, an auxiliary PLL is used to filter the quadrature error to enhance the phase alignment accuracy. Through an elaborate design, a printed circuit board was used to verify the proposed idea. The experimental results show the readout circuit functioned well. The scale factor of the gyro was 6.8 mV/°/s, and the bias instability was 204°/h.