A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

Abstract

This paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synergetic stable drive control and precise angular velocity measurement in three separate degrees of freedom (DOF). Self-excited digital closed loop drives the proof mass in sensing elements at its inherent resonant frequency for Coriolis force generation during angular rotation. The analog front ends in both drive and sense loops are comprised of low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC), so that capacitance variation between combs induced by mechanical motion is transformed into digital voltage signals. Other circuitry elements, such as loop controlling and accurate demodulation modules, are all implemented in digital logics. Automatic amplitude stabilization is mainly realized by peak detection and proportion-integration (PI) control. Nonlinear digital gain adjustment is designed for rapid establishment of resonance oscillation and linearity improvement. Manufactured in a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology, this design achieves a bias instability of 2.1°/h and a nonlinearity of 0.012% over full-scale range.

Research on a Silicon Gyroscope Interface Circuit Based on Closed-Loop Controlled Drive Loop

“…Gyroscopes are sensors that can be used to detect angular velocities [ 1 , 2 , 3 ]. They are widely used in science, technology, the military, and other fields [ 4 , 5 , 6 ]. Compared with traditional gyroscopes, silicon gyroscopes based on microelectromechanical system (MEMS) technology and CMOS technology have the characteristics of low cost, small size, low power consumption, high reliability, and mass producibility [ 7 , 8 ].…”

Nonlinear Vibration Study Based on Uncertainty Analysis in MEMS Resonant Accelerometer

“…Juillard et al studied the properties of nonlinearly operated weakly coupled resonators (WCRs) for resonant sensing applications nonlinear operation of the weak coupling resonator [ 7 ]. Lu et al designed the nonlinear digital gain adjustment for rapid establishment of resonance oscillation and linearity improvement of MEMS vibratory gyroscopes [ 8 ]. In terms of process materials, Agarwal et al established and verified the amplitude frequency dependence (A-F) effect model of MEMS resonators and studied the influence and mechanism of nonlinearity on the frequency stability [ 9 ].…”