A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass

Kim, Jin-Ho; Na, Kwang-Ho; Kang, Chi Jung; Jeon, D.; Kim, Yong−Sang

doi:10.1016/j.mee.2004.03.066

Cited by 14 publications

(12 citation statements)

References 5 publications

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“…The examples of the use of transparent oxide as heaters discussed so far and summarized in Table 1 justify the following observations: the heaters were deposited mainly on glass [ 2 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 26 , 27 , 29 , 31 , 32 , 33 , 34 ] and other solid dielectric materials, such as sapphire [ 25 ] or silicon nitride [ 28 ]. Only ITO/Ag/ITO layers were deposited on a polymeric substrate [ 30 ]; the heaters mostly covered large surface areas and were embedded directly on the surface of the heated object [ 2 , 19 , 20 , 21 , 22 , 24 , 25 , 26 ].…”

Section: Introductionmentioning

confidence: 86%

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Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K

Pawlak

Lebioda

2018

Sensors

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This paper presents an analysis of the electrical and thermal properties of miniature transparent heaters for use in a wide range of temperature applications, from 15 K to 350 K. The heater structures were produced in transparent conducting oxide (TCO) layers: indium tin oxide (ITO) and ITO/Ag/ITO on polymer substrates-polyethylene naphthalate (PEN) and polyethylene terephthalate (PET), by direct laser patterning. Thermo-resistors for temperature measurement were created in the same process, with geometry corresponding to the shape of the heating path. The thermo-resistors integrated with the heating structure allowed easy control of the thermal state of the heaters. Laser patterning provided high precision and repeatability in terms of the geometry and electrical properties of the heater-sensor structures. Measurements at temperatures from 15 K to above room temperature (350 K) confirmed the excellent dynamics of the heating and cooling processes, due to current flow. The largest value for surface heating power was over 3 W/cm2. A heater-sensor structure equipped with a small capacity chamber was successfully applied for controlled heating of small volumes of different liquids. Such structures have potential for use in research and measurements, where for various reasons controlled and accurate heating of small volumes of liquids is required.

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Section: Introductionmentioning

confidence: 86%

“…Transparent oxide heaters have found interesting applications in some microsystems. Thermopneumatic-actuated microvalves with a layer of ITO microheaters deposited on a glass surface were presented in [ 31 ]. A very useful micropump for lab-on-a-chip systems, driven thermally by an ITO microheater, was demonstrated in [ 32 ].…”

Section: Introductionmentioning

confidence: 99%

Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K

Pawlak

Lebioda

2018

Sensors

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“…The simplest systems consist of a small cavity filled with a material, in most cases a fluid, that expands upon heating. This can be either a liquid, like water, isopropanol or special designated fluids like the Performance Fluids fabricated by 3M [1,2] or a gas, which in most cases is normal air [3,2,4,5,6,7,8,9,10,11,12]. On one side the cavity is sealed off by a membrane .…”

Section: Thermal Expansionmentioning

confidence: 99%

“…Several materials are used to form a membrane. Polymers like silicon rubber [14,1,2], parylene [2], polymide [21,3], PDMS [6,7,10,18,20], Kapton [9,8], Mylar [8] are used because of their strength and flexibility, but the silicon itself is also used as a membrane material [4,13,5,19,15,12]. In order to reduce the residual stress and generate a larger deflection a corrugated membrane can be used instead of a flat membrane [5,4,13].…”

Section: Actuator Designmentioning

confidence: 99%

“…Avedisian et al [60] uses a mixture of Tantalum and Aluminum, the thermal inkjet head used in [23] and [55] has a heater of Hafnium-Bromide. Transparent heaters can be made from indiumtin-oxide [6]. It also possible to make a non-metallic heater from poly-silicon [29,61,70] and Gluche et al [94] uses a diamond film as a heater.…”

Section: Design and Fabrication Of The Heatersmentioning

confidence: 99%

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Explosive Micro-Bubble Actuator

Broek

Elwenspoek

2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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Explosive Micro-Bubble Actuator proefschrift ter verkrijging van de graad van doctor aan de Universiteit Twente op gezag van de rector magnificus prof. dr. W.H.M. Zijm, volgens besluit van het College voor Promoties in het openbaar te verdedigen op vrijdag 31 oktober 2008 om 15:00 uur door Dennis Micha van den Broek geboren op 11 augustus 1979 te Vlaardingen Dit proefschrift is goedgekeurd door de promotor: prof. dr. M.C. Elwenspoek aan mijn vader Summary Samenvatting Dankwoord Chapter 1 Actuators and Bubbles A large variety of actuators can be found in literature. This chapter provides a brief overview of different actuator principles with a focus on thermo-pnuematic actuation and actuators, which utilize bubbles to provide the actuation force. The second part of this chapter will give a summary of the research on bubble nucleation and bubble dynamics under high heat-flux conditions. At the end of this chapter, an outline of this thesis is given.

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Capillary Electrophoresis Microchip for DNA Amperometric Detection Featuring Agarose Gel

Ghanim

Abdullah

2014

IFMBE Proceedings

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A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass

Cited by 14 publications

References 5 publications

Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K

Electrical and Thermal Properties of Heater-Sensor Microsystems Patterned in TCO Films for Wide-Range Temperature Applications from 15 K to 350 K

Explosive Micro-Bubble Actuator

Capillary Electrophoresis Microchip for DNA Amperometric Detection Featuring Agarose Gel

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