A disturbance-free surface profile measuring system with sinusoidal phase integrating-bucket modulation

Feng, Fan; Bo, En; Lv, Changrong; Deng, Zhenyu; Xiao, Fu; Huang, Tingting; Duan, Fajie

doi:10.1016/j.measurement.2014.10.013

Cited by 6 publications

(1 citation statement)

References 19 publications

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“…Therefore, laser interference projection is suitable for measuring the 3-D topography of small-sized objects and has a high application value and range. [7][8][9][10][11] The first component of the measurement system is a structured light projection device. In previous years, physical grating and mechanical equipment have been used as the main modes of achieving fringe pattern projection and phase shifting.…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

Duan

et al. 2018

Opt. Eng.

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Three-dimensional measurement of small-object surfaces on the basis of fiber Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection optic interferometric fringe projection Abstract Abstract We used a system that exploits the Mach-Zehnder interferometer structure and Young's double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision.Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 x 10cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%. . (2018). Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection. Optical Engineering, 57 (9), 094105-1-094105-9.Abstract. We used a system that exploits the Mach-Zehnder interferometer structure and Young's doublepinhole interference principle to measure the three-dimensional topographies of small objects at high precision.Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 × 10-cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%.

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