A dual-mode thickness-shear quartz pressure sensor

Besson, R.J.; Boy, J.J.; Glotin, B.; Jinzaki, Y.; Sinha, Bikash K.; Valdois, M.

doi:10.1109/ultsym.1991.234213

Cited by 4 publications

(2 citation statements)

References 19 publications

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“…Temperature control system and the complicated structure can cause high cost on the manufacture of the pressure sensor [10]. Besson [11] presented a design of dual-mode thickness shear quartz pressure sensor to retrieve the applied pressure and the in-situ temperature of the sensor from the same resonator. This resonator employs doubly rotated cuts of quartz.…”

Section: Pressure Measurement and Pressure Sensormentioning

confidence: 99%

Design, Modeling, and Experiment of a Piezoelectric Pressure Sensor Based on a Thickness-Shear-Mode Crystal Resonator

Pham

Zhang

Kaluvan

et al. 2017

IEEE Trans. Ind. Electron.

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This thesis presents the design, modeling, and experiment of a novel pressure sensor using a dual-mode AT-cut quartz crystal resonator with beat frequency analysis based temperature compensation technique. The proposed sensor can measure pressure and temperature simultaneously by a single AT-cut quartz resonator. Apart from AT-cut quartz crystal, a newly developed Langasite (LGS) crystal resonator is also considered in the proposed pressure sensor design, since LGS can operate in a higher temperature environment than ATcut quartz crystal. The pressure sensor is designed using CAD (computer aided design) software and CAE software -COMSOL Multiphysics. Finite element analysis (FEA) of the pressure sensor is performed to analyze the stress-strain of the sensor's mechanical structure. A 3D printing prototype of the sensor is fabricated and the proposed sensing principle is verified using a force-frequency analysis apparatus. Next to the 3D printing model verification, the pressure sensor with stainless steel housing has been fabricated with inbuilt crystal oscillator circuit. The oscillator circuit is used to excite the piezo crystal resonator at its fundamental vibrational mode and give the frequency as an output signal. Based on the FEA and experimental results, it has been concluded that the maximum pressure that the sensor can measure is 45 (psi). The pressure test results performed on the stainless steel product shows a highly linear relationship between the input (pressure) and the output (frequency).ii

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Section: Pressure Measurement and Pressure Sensormentioning

confidence: 99%

Design, Modeling, and Experiment of a Piezoelectric Pressure Sensor Based on a Thickness-Shear-Mode Crystal Resonator

Pham

Zhang

Kaluvan

et al. 2017

IEEE Trans. Ind. Electron.

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show abstract

“…However, the research in such field [5][6][7][8][9][10][11][12][13][14][15] do not take into account the whole spectrum of specific conditions of modern PRD functioning, which reveals in sharp changes in temperature rate and substantial vibration and mechanical effects, which makes the task of providing the invariance in the conditions of parametrical non-stationarity essentially difficult. At that the following mechanisms, which define the dynamics of multifrequency PRD, can be defined [16,17]:…”

Section: Introductionmentioning

confidence: 99%

Mathematical Model of Multi-Frequency Piezoresonance Oscillation System

Zelensky¹

2013

COM

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Abstract:The paper represents the basic model of multi-frequency piezoresonance oscillation system (MPOS) -the piezoresonance devices (PRD) core, which enables to study the processes of establishing multi-frequency oscillation mode and its stability. The basic structure of multi-channel multi-frequency PRD core, which is based on principles of filter schemes, is proposed, and the main designations are entered. The peculiarities of truncated differential equations for amplitude, phase and auto-bias voltage of MPOS for the quantity of simultaneously generated frequencies 2 ≥ m are examined. On the example of three-frequency mode of oscillation under polynomial approximation of transferable characteristics of active elements the characteristic cases of establishing oscillations in MPOS are represented. The area of a steady three-frequency oscillating behavior is defined and the assessment of time of establishment of oscillations and value of group runout of frequencies is made. Received results enable to form a new approach to construction of piezoresonance devices with controlled dynamics, which are represented in the form of adaptive controlled systems with predictive standard model and develop on its basis the new class of invariant to destabilizing disturbing PRD factors. On the basis of such approach there is the principle of using natural redundancy in multi-frequency basis of PRD core -multi-frequency oscillation system, which enables not only to synthesize the system with current identification of disturbing factors on basis of instruments of invariance theory, but also do the adaptation of PRD in accordance with their influences.

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A high sensitivity resonator pressure sensor

Yang

Zhang

2002

Sensors and Actuators A: Physical

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A dual-mode thickness-shear quartz pressure sensor

Cited by 4 publications

References 19 publications

Design, Modeling, and Experiment of a Piezoelectric Pressure Sensor Based on a Thickness-Shear-Mode Crystal Resonator

Design, Modeling, and Experiment of a Piezoelectric Pressure Sensor Based on a Thickness-Shear-Mode Crystal Resonator

Mathematical Model of Multi-Frequency Piezoresonance Oscillation System

A high sensitivity resonator pressure sensor

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