2013
DOI: 10.1002/sca.21110
|View full text |Cite
|
Sign up to set email alerts
|

A dynamic scanning method based on signal-statistics for scanning electron microscopy

Abstract: A novel dynamic scanning method for noise reduction in scanning electron microscopy and related applications is presented. The scanning method dynamically adjusts the scanning speed of the electron beam depending on the statistical behavior of the detector signal and gives SEM images with uniform and predefined standard deviation, independent of the signal value itself. In the case of partially saturated images, the proposed method decreases image acquisition time without sacrificing image quality. The effecti… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Year Published

2016
2016
2021
2021

Publication Types

Select...
3
1

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 7 publications
0
2
0
Order By: Relevance
“…This is possible with a small reduction in image quality, if the images have structures aligned in the x - and y -direction. A first dynamic scanning method was introduced by Timischl (2014). The approach is based on adjusting the scanning speed to the number of detected electrons in that pixel.…”
Section: Introductionmentioning
confidence: 99%
“…This is possible with a small reduction in image quality, if the images have structures aligned in the x - and y -direction. A first dynamic scanning method was introduced by Timischl (2014). The approach is based on adjusting the scanning speed to the number of detected electrons in that pixel.…”
Section: Introductionmentioning
confidence: 99%
“…During conversion from a non-Cartesian grid to a Cartesian grid, the number of pixels doubles with only a small reduction in image quality, at least in images with structures aligned in x- and y-direction. Timischl 22 proposed a dynamic scanning method based on adjusting the scanning speed to the amount of detected electrons. In bright appearing sample areas, more electrons are detected, and the scanning speed can be increased.…”
mentioning
confidence: 99%