This article reports the fabrication of hybrid silica nanoparticles using surface-initiated atom transfer radical polymerization (SI-ATRP) technique. The surface of silica nanoparticles were densely grafted with 2-(dimethylamino) ethyl methacrylate (DMAEMA) and then quaternized with 1-bromohexane via two methods. FTIR, 1 H NMR, XPS, SEM, TGA, and GPC were used to determine the chemical structure, morphology, and other properties of the products. SEM images of nanocomposites showed spherical shaped morphology with an average diameter of ∼50 nm and they were direct evidences that the hybrid silica nanoparticles had uniform core-shell morphology. Evolution of GPC traces of grafted polyDMAEMA showed that the SI-ATRP could be conducted in a well-controlled manner.