A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Battini, F.; Volpi, Emilio; Marchetti, E.; Cecchini, Tommaso; Sechi, Francesco; Fanucci, Luca; Hofmann, Ulrich

doi:10.1109/iwasi.2009.5184777

Cited by 3 publications

(3 citation statements)

References 5 publications

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“…4). Experimental results, concerning the real torsional micromirror fabricated at the Fraunhofer ISIT Institute, confirm the aforementioned value (Battini et al 2009). …”

Section: Mechanical Simulations For the Resonance Frequency Extractionsupporting

confidence: 74%

Modeling of an electrostatic torsional micromirror for laser projection system

et al. 2010

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This paper presents the Simulink model of a new 2D torsional scanning micromirror. This micro-opto-electro-mechanical-system (MOEMS) is very important towards the integration into a system on a package of a complete laser projection system. Modeling and simulation of the MOEMS is a key point for the development of the proper micromirror electronic conditioning interface thus reducing time to market and production costs. In literature, there are not exhaustive examples of complete characterizations of 2D torsional scanning micromirrors. The aim of this work is to develop a Simulink model which incorporates the main mechanical and electrostatic parameters of the sensor such as the resonance frequency, the torsional constant and capacitance versus rotation angle characteristic. This model has been successfully verified via experimental measurements and it proved his effectiveness in the development of the relevant electronic conditioning circuitry

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“…4). Experimental results, concerning the real torsional micromirror fabricated at the Fraunhofer ISIT Institute, confirm the aforementioned value (Battini et al 2009). …”

Section: Mechanical Simulations For the Resonance Frequency Extractionsupporting

confidence: 74%

Modeling of an electrostatic torsional micromirror for laser projection system

et al. 2010

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“…It is characterized by large scan angle, high flatness and high scanning frequency [1,2]. The electrostatically actuated double-axis micromirror used as reference for the design of the laser projection system, the DAC works for is developed within a collaboration between SensorDynamics AG and the Fraunhofer Institute for Silicon Technology (ISIT) [2,[7][8][9][10]. As reported in Figure 1 it consists of a circular polysilicon mirror plate covered with aluminum and connected to a gimbal frame by a pair of polysilicon torsion springs.…”

Section: Scanning Micromirrormentioning

confidence: 99%

“…Thus we can check from a graphical point of view which are the solutions, in our design space, providing a good trade-off between area occupation and linearity. As a result of the design exploration based on the proprietary tool [9], considering target INL and DNL values below 1 LSB, polysilicon resistors have been used of dimensions of L = 4 μm and W = 3 μm with a resistance value of about R = 550 Ω for each module. The total resistance of the 10-bit string is R tot = 550 Ω • 1024 = 563.2 kΩ.…”

Section: Dac Converter Designmentioning

confidence: 99%

A Cost-Effective 10-Bit D/A Converter for Digital-Input MOEMS Micromirror Actuation

2010

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The design of a 10-bit resistor-string digital-to-analog converter (DAC) for MOEMS micromirror interfacing is addressed in this paper. The proposed DAC, realized in a 0.18-μm BCD technology, features a folded resistor-string stage with a switch matrix and address decoders plus an output voltage buffer stage. The proposed DAC and buffer circuitry are key elements of an innovative scanning micromirror actuator, characterized by direct digital input, full differential driving, and linear response. With respect to the the state-of-the-art resistor-string converters in similar technologies, the proposed DAC has comparable nonlinearity (INL, DNL) performances while it has the advantage of a smaller area occupation, 0.17 mm2, including output buffer, and relatively low-power consumption, 200 μW at 500 kSPS and few μW in idle mode.

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Sensor Modeling, Low-Complexity Fusion Algorithms, and Mixed-Signal IC Prototyping for Gas Measures in Low-Emission Vehicles

Saponara

Petri

Fanucci

et al. 2011

IEEE Trans. Instrum. Meas.

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This paper addresses the detection of hydrogen leaks for safety warning systems in automotive applications and the measurement of nitrogen oxide concentration in exhaust gases of zero-emission vehicles. The presented approach is based on the development of accurate models (including nonlinearity and error sources of real building components) for all the system elements: sensors and acquisition chain. This methodology enables efficient design space exploration and sensitivity analysis, allowing an optimal analog-digital and hardware-software partitioning. Such analysis drives also the development of effective data fusion techniques to reduce the measure uncertainty (due to cross-sensitivity to other gases or to temperature/humidity variations). Such techniques have been implemented on a microcontroller-based mixed-signal embedded platform for intelligent sensor interfacing with limited complexity, suitable for automotive applications

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A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Cited by 3 publications

References 5 publications

Modeling of an electrostatic torsional micromirror for laser projection system

Modeling of an electrostatic torsional micromirror for laser projection system

A Cost-Effective 10-Bit D/A Converter for Digital-Input MOEMS Micromirror Actuation

Sensor Modeling, Low-Complexity Fusion Algorithms, and Mixed-Signal IC Prototyping for Gas Measures in Low-Emission Vehicles

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