A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses

Malinauskas, Mangirdas; Gilbergs, Holger; Žukauskas, Andrius; Purlys, Vytautas; Paipulas, Domas; Gadonas, R.

doi:10.1088/2040-8978/12/3/035204

Cited by 85 publications

(68 citation statements)

References 35 publications

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“…[1][2][3][4] Developments of new materials and illumination concepts like the STED lithography [5][6][7] have pushed the lateral dimensions of realizable structures below 100 nm. With the variability of the technology, several applications have emerged, e.g., in the field of micro-optics, where the fabrication of photonic crystals 8,9 or micro-optical elements [10][11][12][13] has been demonstrated. Furthermore, biomedical devices like scaffolds for cell growth [14][15][16][17] or small prostheses 18 could be realized.…”

Section: Introductionmentioning

confidence: 99%

Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

Burmeister

Steenhusen

Houbertz

et al. 2012

Journal of Laser Applications

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The fabrication of sub-100 nm feature sizes in large-scale three-dimensional (3D) geometries by two-photon polymerization requires a precise control of the polymeric reactions as well as of the intensity distribution of the ultrashort laser pulses. The authors, therefore, investigate the complex interplay of photoresist, processing parameters, and focusing optics. New types of inorganic– organic hybrid polymers are synthesized and characterized with respect to achievable structure sizes and their degree of crosslinking. For maintaining diffraction-limited focal conditions within the 3D processing region, a special hybrid optics is developed, where spatial and chromatic aberrations are compensated by a diffractive optical element. Feature sizes below 100 nm are demonstrated.

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Section: Introductionmentioning

confidence: 99%

Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

Burmeister

Steenhusen

Houbertz

et al. 2012

Journal of Laser Applications

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“…In comparison with annular hatching strategies (Malinauskas et al 2010), no ring-shaped undulations of the surface are apparent. These are normally induced by minor laser power instabilities that impact the surface formation as 2PP is strongly dependent (∝ I 2 ) on the applied photon dose .…”

Section: Ppmentioning

confidence: 88%

Laser polishing and 2PP structuring of inside microfluidic channels in fused silica

Weingarten

Steenhusen

Hermans³

et al. 2017

Microfluid Nanofluid

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This study presents the development of post-processing steps for microfluidics fabricated with selective laser etching (SLE) in fused silica. In a first step, the SLE surface-even inner walls of microfluidic channels—can be smoothed by laser polishing. In addition, two-photon polymerization (2PP) can be used to manufacture polymer microstructures and microcomponents inside the microfluidic channels. The reduction in the surface roughness by laser polishing is a remelting process. While heating the glass surface above softening temperature, laser radiation relocates material thanks to the surface tension. With laser polishing, the RMS roughness of SLE surfaces can be reduced from 12 µm down to 3 nm for spatial wavelength λ < 400 µm. Thanks to the laser polishing, fluidic processes as well as particles in microchannels can be observed with microscopy. A manufactured microfluidic demonstrates that SLE and laser polishing can be combined successfully. By developing two-photon polymerization (2PP) processing in microchannels we aim to enable new applications with sophisticated 3D structures inside the microchannel. With 2PP, lenses with a diameter of 50 µm are processed with a form accuracy rms of 70 nm. In addition, this study demonstrates that 3D structures can be fabricated inside the microchannels manufactured with SLE. Thanks to the combination of SLE, laser polishing and 2PP, research is pioneering new applications for microfluidics made of fused silica

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“…Figure 6b shows a cylindrical (open) microstructure, whose details will be discussed latter. For real optical device applications smother microstructures would be necessary, which can be obtained by using a higher voxel overlap 14, 23,37 . Figure 7a shows a SEM image of microstructures containing Stilbene 420.…”

Section: Microstructures Fabricated Using Two-photon Absorption Polymmentioning

confidence: 99%

Femtosecond lasers for processing glassy and polymeric materials

et al. 2013

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Novel materials have been developed to meet the increasing mechanical, electrical and optical properties required for technological applications in different fields of sciences. Among the methods available for modifying and improving materials properties, femtosecond laser processing is a potential approach. Owing to its precise ablation and modification capability, femtosecond laser processing has already been employed in a broad range of materials, including glasses and polymers. When ultrashort laser pulses are focused into a transparent material, the intensity at the focus can become high enough to induce nonlinear optical processes. Here, we report on femtosecond (fs) laser microfabrication in special glasses and polymers. Initially, we describe fs-laser micromachining on the surface of copper doped borate and borosilicate glasses. Subsequently, we present results on two-photon induced polymerization to fabricate microstructures containing fluorescent dyes for manufacturing optical microcavities. Both approaches are promising for designing optical and photonics micro/nanodevices.

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A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses

Cited by 85 publications

References 35 publications

Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

Materials and technologies for fabrication of three-dimensional microstructures with sub-100 nm feature sizes by two-photon polymerization

Laser polishing and 2PP structuring of inside microfluidic channels in fused silica

Femtosecond lasers for processing glassy and polymeric materials

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