A flexible micromachined electrode array for a cochlear prosthesis

An Active Thin-Film Cochlear Electrode Array With Monolithic Backing and Curl

“…The first silicon thin-film cochlear electrode arrays were developed by Bell and Wise at the University of Michigan [38]. The arrays consisted of 22 iridium (Ir) oxide electrodes and attached polysilicon lead lines over boron-doped silicon substrates.…”

“…To insulate the trace lines, stress-compensated oxide-nitride-oxide dielectric stacks were used. The silicon arrays were able to initiate auditory brain responses in guinea pigs through the cochlea [38]. Based on the initial success of these first-generation passive arrays, Bell and Wise went on to create a second generation of active arrays [40].…”

Highly Flexible Silicone Coated Neural Array for Intracochlear Electrical Stimulation

“…By layering and patterning dielectrics and conductors upon such substrates, multisite stimulating and recording electrode arrays have been realized with submicron precision. Serving as an essential interface between the nervous system and microelectronics, TFAs have enabled a greater understanding of electrical and chemical signaling in the brain [ 6 – 9 ], as well as a therapeutic option for overcoming sensory loss in the auditory [ 10 – 13 ] and visual [ 14 , 15 ] systems. The ongoing validation, as well as the need, of multisite TFAs has ultimately led to the commercial availability of lithographically defined, batch-processed arrays (Neural Nexus Technologies, Ann Arbor, MI).…”