A Flowmeter with Piezoresistive Metal Layer Deposited with Focused-Ion-Beam System

Choi, Dae Keun; Lee, Sang Hoon

doi:10.1080/10584587.2014.912910

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2024

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“…In S10 of ESI,† we compare the performances of the proposed BSBA and other MEMS piezoresistive airflow sensors using indicators, including the sensing unit number, sensitivity, sensing range, response time, and bi-directional sensing capability. 13,20,27–30 The BSBA outperforms conventional airflow sensors that require additional sensing units to achieve bi-directional airflow detection due to the inconsistent response of curved microcantilevers to positive and negative stimuli. Unlike other MEMS piezoresistive flow sensors, the enlarged center and bio-inspired CTS on the cruciform beam enable bi-directional airflow detection consistently using a single BSBA sensor.…”

Section: Experiments and Resultsmentioning

confidence: 99%