2011
DOI: 10.1109/ted.2011.2162414
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A Focused Asymmetric Metal–Insulator–Metal Tunneling Diode: Fabrication, DC Characteristics and RF Rectification Analysis

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Cited by 54 publications
(45 citation statements)
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“…25 Likewise, crystallization of bottom electrode increases electrode surface roughness which can generate local electric field enhancements or hot spots. 26 Atomic force microscopy (AFM) shows an increase in surface roughness and XRD shows signs of crystallization when ZCAN is annealed at 380 C and above. In order to avoid the possibility of crystallization of either the ALD insulators or the ZCAN bottom electrodes, all devices are studied as-deposited, without annealing treatments.…”
Section: Methodsmentioning
confidence: 99%
“…25 Likewise, crystallization of bottom electrode increases electrode surface roughness which can generate local electric field enhancements or hot spots. 26 Atomic force microscopy (AFM) shows an increase in surface roughness and XRD shows signs of crystallization when ZCAN is annealed at 380 C and above. In order to avoid the possibility of crystallization of either the ALD insulators or the ZCAN bottom electrodes, all devices are studied as-deposited, without annealing treatments.…”
Section: Methodsmentioning
confidence: 99%
“…By combining bilayer tunnel barriers with the standard approach of asymmetric metal electrodes, we are able to achieve low voltage asymmetry and non-linearity exceeding both that of standard single layer asymmetric electrode metal-insulator-metal devices as well as symmetric electrode M 1 I 1 I 2 M 1 devices. Thin film metal-insulator-metal (MIM) tunnel devices have seen renewed interest for high speed applications [1][2][3] such as infrared (IR) detectors, 4-6 optical rectennas for IR energy harvesting, [7][8][9] and hot electron transistors, 10 as well as for macroelectronic applications such as backplanes for liquid-crystal displays (LCDs). 11,12 For many of these applications, highly asymmetric and non-linear current vs. voltage (I-V) behavior at low applied voltages is desired.…”
mentioning
confidence: 99%
“…[1][2][3][4][5][6][7]14,16,18,19 We recently showed that roughness at the bottom metalinsulator interface can dominate the I-V behavior of MIM diodes and that the use of atomically smooth bottom electrodes combined with high quality insulators deposited via atomic layer deposition (ALD) allowed for fabrication of high quality MIM diodes with well controlled quantum mechanical tunneling. 20,21 Therefore, we fabricate M 1 IIM 2 diodes using smooth amorphous metal ZrCuAlNi (ZCAN) bottom electrodes 22 and nanolaminate insulator bilayers of HfO 2 and Al 2 O 3 deposited via ALD.…”
mentioning
confidence: 99%
“…19 It is also important to point out that to improve the rectifying performance of a MIM tunneling diode, the sensitivity given by the ratio of second derivative and first derivative of the I-V characteristic of the diode needs to be increased. 20 The sensitivity of the diode with the insulator layer fabricated under a thermal oxidation time of 96 hours is shown in the inset of Figure 5b, and the maximum sensitivity obtained is 7.3 V −1 at V bias of 0.1 V, which is lower than the value reported in Nb-Nb 2 O 5 -Pt MIM diode. 21 This might be attributed toward the work function difference between the mental electrodes and also due to the interfacial roughness.…”
Section: Resultsmentioning
confidence: 68%