A four‐degree‐of‐freedom microprehensile microrobot on chip

Abstract

This paper presents a cheap and easy‐to‐produce microprehensile microrobot on chip (MMOC). This four‐degree‐of‐freedom (DOFs) microprehensor is able to grip, hold and release submillimetric‐sized objects. The research conducted relied heavily on the design of a simple and efficient monolithic piezoelectric two‐DOF actuator, requiring no further motion transformation system and asking for no supplementary guiding system. The integration of all these functions in a single part eliminates nearly all assembly concerns. Each finger of the gripper is an actuator, called a duo‐bimorph, which provides higher deflections than piezoelectric tubes. The paper presents the developed MMOC prototype, comments its performances and details the functioning of the duo‐bimorph.

Dynamic force/position modeling of a one-DOF smart piezoelectric micro-finger with sensorized end-effector

“…The smart finger is composed of a duo bimorph piezoelectric actuator presented in [1] and a novel piezoresistive force sensor presented in [16]. Two Keyence laser sensors are used to measure the displacement of the actuator's tip A and the end-effector's tip B.…”

“…Their use is due to their high resolution, high speed, low response time and their ability to produce large forces. They are widely used for the development of microgrippers [1], robotic platforms [2], nanopositioning [3] for examples. However, the problem of the piezoelectric materials are the presence of nonlinearities which increases the difficulty of modeling and control of such systems.…”

Stable haptic feedback based on a dynamic vision sensor for microrobotics

“…The micromanipulation end-effector developed in FEMTO-ST Institute [30] is a microgripper with tightened fingers that proves to be efficient and intuitive for microhandling problems (Fig. 1).…”

Feedforward and IMC-feedback control of a nonlinear 2-DOF piezoactuator dedicated to automated micropositioning tasks

“…While the development and control of 1-dof bending piezoactuators are almost well established, this is not the case for 2 or multiple dof actuators. First, the development of bending piezoactuators having more than 1-dof is new [16] [17]. In fact, certain recent applications such as spatial (x-y-z) micropositioning or those which combines positioning and orientation require dexterous devices and thus single dof actuators are not anymore efficient.…”