A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Liu, Yingxiang; Wang, Yun; Xu, Dongmei; Li, Kai; Shan, Xiaobiao; Deng, Jie

doi:10.3390/s18051471

Cited by 17 publications

(7 citation statements)

References 35 publications

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“…Therefore, the common strategy between Li et al [ 11 ] and Ma et al [ 12 ] was to separately simulate the compliant mechanism and the driving mechanism (PM) of the system to indirectly obtain the desired output. As for PIM research in recent years, a four-foot rotary piezoelectric motor without a clamping mechanism was developed in Liu’s study [ 13 ], its transient simulation work took into account friction between the rotor and driving foot, but the key deformation mode of the PM and the abovementioned coupling problem were not reflected in the simulation. For the flexure mechanism + drive mechanism-type PIM research, such as Ma et al’s [ 12 ], Zhang et al [ 14 ] conducted stress and frequency analyses of the driving mechanism presented in a steady state simulation.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, the mechanical coupling between the PM and flexure mechanism or motor shaft was rarely reflected. Finally, the travel performance of the PIM was obtained by actual measurement or indirect formula calculation; it was not capable of being obtained directly from the simulation model [ 12 , 13 , 14 ]. However, for the motor design, the relationship between the specifications of the PM (i.e., type and size) and precision motor performance (i.e., driving force and travel) is what professional developers want to know most.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

2020

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Ultra-precision piezoelectric inchworm motor (PIM) is widely used as optical equipment, in the microelectronics semiconductor industry, and in precision manufacturing for motion and positioning, but the multi-physics field simulation model for PIM performance estimation and assisting motor design is rarely studied. The simulation model in this paper aimed to provide researchers with direct and convenient PIM performance evaluation to assist the motor design and development. According to the existing advanced inchworm motor products, a multi-physics field coupling model involving solid mechanics and electrostatics using the finite element method (FEM) was established. The motion gesture and performance (driving force and travel) of the PIM were analyzed, respectively. The simulation results showed that the motion gesture of the inchworm motor was well consistent with that of the actual motor product. The driving force from the simulation was close to that of the actual product, and the maximum error was 2.8%. As for the PIM travel, there was a maximum travel error of 0.6 μm between the simulation and official data. The performance parameters of the piezoelectric materials under certain specifications can be simulated by the multi-physics field coupling model. Therefore, the multi-physics field coupling simulation model is suitable for PIM performance evaluation and assisting motor development.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

2020

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“…One of the areas is actuation. Because of their advantages of simple structure, flexible design, high resolution, and low power consumption, many piezoelectric actuators have been developed [11][12][13][14]. Actuators can be classified by vibration state into the resonant type and the non-resonant type.…”

Section: Introductionmentioning

confidence: 99%

Design, Analysis, and Experiment on a Novel Stick-Slip Piezoelectric Actuator with a Lever Mechanism

Huang

Sun

2019

Micromachines

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A piezoelectric actuator using a lever mechanism is designed, fabricated, and tested with the aim of accomplishing long-travel precision linear driving based on the stick-slip principle. The proposed actuator mainly consists of a stator, an adjustment mechanism, a preload mechanism, a base, and a linear guide. The stator design, comprising a piezoelectric stack and a lever mechanism with a long hinge used to increase the displacement of the driving foot, is described. A simplified model of the stator is created. Its design parameters are determined by an analytical model and confirmed using the finite element method. In a series of experiments, a laser displacement sensor is employed to measure the displacement responses of the actuator under the application of different driving signals. The experiment results demonstrate that the velocity of the actuator rises from 0.05 mm/s to 1.8 mm/s with the frequency increasing from 30 Hz to 150 Hz and the voltage increasing from 30 V to 150 V. It is shown that the minimum step distance of the actuator is 0.875 μm. The proposed actuator features large stroke, a simple structure, fast response, and high resolution.

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“…Hunstig summarized the features of piezoelectric motors and discussed their applications and prospective [20]. Liu et al proposed a piezoelectric actuator using different bending vibration modes to perform linear or rotary motions [21][22][23]. Most recently, Lu et al demonstrated a disk-type inertial rotary motor with a no-load speed of 2200 r/min and stalling torque of 0.5 mN•m, which can be used for building a single shaft-type thruster to actuate a spherical underwater robot model moving at different operation patterns [24].…”

Section: Introductionmentioning

confidence: 99%

A Novel Dual-Rotor Ultrasonic Motor for Underwater Propulsion

Wang

Shen

et al. 2019

Applied Sciences

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Micro underwater vehicles (MUVs) have been highlighted recently for underwater explorations because of their high maneuverability, low price, great flexibility, etc. The thrusters of most conventional MUVs are driven by electromagnetic motors, which need big mechanical transmission parts and are prone to being interrupted by the variance of ambient electromagnetic fields. In this paper, a novel dual-rotor ultrasonic motor with double output shafts, compact size, and no electromagnetic interference is presented, characterized, and applied for actuating underwater robots. This motor was composed of a spindle-shaped stator, pre-pressure modulation unit, and dual rotors, which can output two simultaneous rotations to increase the propulsion force of the MUV. The pre-pressure modulation unit utilized a torsion spring to adjust the preload at the contact faces between the stator and rotor. The working principle of the ultrasonic motor was developed and the vibration mode of the stator was analyzed by the finite element method. Experimental results show that the no-load rotary speed and stalling torque of the prototype ultrasonic motor were 110 r/min and 3 mN·m, respectively, with 150 V peak-to-peak driving voltage at resonance. One underwater robot model equipped with the proposed ultrasonic motor-powered thruster could move at 33 mm/s immersed in water. The dual-rotor ultrasonic motor proposed here provides another alternative for driving MUVs and is appropriate for developing specific MUVs when the electromagnetic interference issue needs to be considered.

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A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Cited by 17 publications

References 35 publications

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Design, Analysis, and Experiment on a Novel Stick-Slip Piezoelectric Actuator with a Lever Mechanism

A Novel Dual-Rotor Ultrasonic Motor for Underwater Propulsion

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