Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Zhao, Bo; Fang, Ri; Shi, Weijia

doi:10.3390/ma13183976

Cited by 7 publications

(5 citation statements)

References 18 publications

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“…However, traditional high-precision motion systems with 3-DoFs (XYZ) fail to account for pitch, yaw, and small angular deviations [5]. These errors, at the spatial scale, pose critical challenges for the increasing miniaturization and integration of devices [6][7][8]. Moreover, relying solely on traditional flexure-based nanopositioning stages can provide submicron or nanometer accuracy, but it is hard to meet the large travel range requirements [9].…”

Section: Introductionmentioning

confidence: 99%

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Liao,

Lin,

Tang

et al. 2024

Micromachines

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This article presents the design, analysis, and prototype testing of a four-degrees-of-freedom (4-DoFs) spatial pose adjustment system (SPAS) that achieves high-precision positioning with 4-DoFs (Z/Tip/Tilt/Θ). The system employs a piezoelectric-driven amplification mechanism that combines a bridge lever hybrid amplification mechanism, a double four-bar guide mechanism, and a multi-level lever symmetric rotation mechanism. By integrating these mechanisms, the system achieves low coupling, high stiffness, and wide stroke range. Analytical modeling and finite element analysis are employed to optimize geometric parameters. A prototype is fabricated, and its performance is verified through testing. The results indicate that the Z-direction feed microstroke is 327.37 μm, the yaw motion angle around the X and Y axes is 3.462 mrad, and the rotation motion angle around the Z axis is 12.684 mrad. The x-axis and y-axis motion magnification ratio can reach 7.43. Closed-loop decoupling control experiments for multiple-input-multiple-outputs (MIMO) systems using inverse kinematics and proportional-integral-derivative feedback controllers were conducted. The results show that the Z-direction positioning accuracy is ±100 nm, the X and Y axis yaw motion accuracy is ±2 μrad, and the Z-axis rotation accuracy is ±25 μrad. Due to the ZTTΘ mechanism, the design proved to be feasible and advantageous, demonstrating its potential for precision machining and micro-nano manipulation.

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Section: Introductionmentioning

confidence: 99%

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Liao,

Lin,

Tang

et al. 2024

Micromachines

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show abstract

“…Furthermore, it relies on friction to drive the actuator to achieve both large stroke and high precision motion. Currently, the piezoelectric motors reliant on friction can be divided into ultrasonic type [ 11 , 12 , 13 ], inertial type [ 14 , 15 , 16 ] and inchworm type [ 17 , 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Experiment of a Clamping-Drive Alternating Operation Piezoelectric Actuator

2023

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In recent years, piezoelectric actuators, represented by inertial and inchworm actuators, have been widely applied because of their high accuracy and excellent responsiveness. Despite the development of various piezoelectric actuators, there remain some flaws in this technology. The sticking point is that the piezoelectric actuators based on the friction driving principle are prone to unwanted backward motion when outputting stepping motion. It is thus urgent to explore solutions from the perspectives of principle and structure. In this paper, a clamping-drive alternating operation piezoelectric actuator is proposed, the two feet of which are driven by two piezoelectric stacks, respectively. Due to double-foot alternate drive guide movement, backward movement is prevented in theory. By adopting the double-layer stator structure, integrated processing and assembly are facilitated. Meanwhile, a double flexible hinge mechanism is installed in the stator to prevent the drive foot from being overturned due to ineffectiveness and premature wear. In addition, the stator is equipped with the corresponding preload mechanism and clamping device. After the cycle action mechanism of one cycle and four steps is expounded, a model is established in this study to further demonstrate the principle. With the prototype produced, a series of experiments are performed. In addition, the amplitude of actuation of the stator is tested through amplitude experiment. The performance of the stator is evaluated by conducting experiments in the alternating step and single step actuation modes. Finally, the test results are analyzed to conclude that the actuator operating in either of these two modes can meet the practical needs of macro and micro actuation.

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“…An inchworm actuator is a kind of actuator that imitates the crawling action of multi-legged insects. This kind of actuator works at non-resonant frequencies, and features low speed, small size, great output force, and high displacement resolution [ 14 , 15 ]. Piezo-inertia actuators, also known as piezo-stick-slip actuators, utilize the moving part’s inertia to generate small displacements through uninterrupted frictional contact.…”

Section: Introductionmentioning

confidence: 99%

A Compact Piezo-Inertia Actuator Utilizing the Double-Rocker Flexure Hinge Mechanism

Sun

Lei

et al. 2023

Micromachines

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With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse velocities at the same time. To achieve a high speed, high resolution, and low deviation, in this paper we present a compact piezo-inertia actuator with a double rocker-type flexure hinge mechanism. The structure and operating principle are discussed in detail. To study the load capacity, voltage characteristics, and frequency characteristics of the actuator, we made a prototype and conducted a series of experiment. The results indicate good linearity in both positive and negative output displacements. The maximum positive and negative velocities are about 10.63 mm/s and 10.12 mm/s, respectively, and the corresponding speed deviation is 4.9%. The positive and negative positioning resolutions are 42.5 nm and 52.5 nm, respectively. In addition, the maximum output force is 220 g. These results show that the designed actuator has a minor speed deviation and good output characteristics.

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Modeling of Motion Characteristics and Performance Analysis of an Ultra-Precision Piezoelectric Inchworm Motor

Cited by 7 publications

References 18 publications

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Design and Testing of a Compliant ZTTΘ Positional Adjustment System with Hybrid Amplification

Design and Experiment of a Clamping-Drive Alternating Operation Piezoelectric Actuator

A Compact Piezo-Inertia Actuator Utilizing the Double-Rocker Flexure Hinge Mechanism

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