Previously reported inertia actuators mostly have the problem of greater deviations between positive and reverse speeds. To solve this problem, we have developed a novel piezo inertia actuator with a similar structure, inspired by the motion mode of the steam train's transmission mechanism. Based on the inertia principle, a saw-tooth waveform voltage is used to drive the actuator. The aim of this study is to report the model design, working principle and the output characteristics experiment of the designed actuator. The prototype is fabricated for testing of mechanical properties. Experiments indicate that the positive and reverse average speeds are 12.59 mm/s and 11.99 mm/s, respectively, with a deviation rate of 4.9%, which is much lower than those of previous actuators. Finally, the experiment proves the effectiveness of the novel piezo inertia actuator inspired by the motion mode of the steam train's transmission mechanism.

With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse velocities at the same time. To achieve a high speed, high resolution, and low deviation, in this paper we present a compact piezo-inertia actuator with a double rocker-type flexure hinge mechanism. The structure and operating principle are discussed in detail. To study the load capacity, voltage characteristics, and frequency characteristics of the actuator, we made a prototype and conducted a series of experiment. The results indicate good linearity in both positive and negative output displacements. The maximum positive and negative velocities are about 10.63 mm/s and 10.12 mm/s, respectively, and the corresponding speed deviation is 4.9%. The positive and negative positioning resolutions are 42.5 nm and 52.5 nm, respectively. In addition, the maximum output force is 220 g. These results show that the designed actuator has a minor speed deviation and good output characteristics.

Most previously reported inertia actuators suffer from the problems of low speed and large size. To overcome these shortcomings, this study proposes a slim compact piezo inertia actuator based on the principle of stick–slip drive. Actuated by the transverse motion of a cantilever beam forming part of a monolithic elastomer, this actuator achieves a high velocity. The construction and basic operating principle of the actuator are discussed in detail. Commercial finite element analysis software is employed to determine the appropriate geometry for the monolithic elastomer. To study the actuator’s mechanical characteristics, a prototype is fabricated and a series of experimental tests are performed. According to the results of these tests, the maximum velocity and maximum load force are about 24.03 mm/s and 1.96 N, respectively, and the minimum step size is about 0.47 μm. It is shown that the inertia actuator based on a monolithic elastomer with a cantilever beam not only has a slim compact structure, but also exhibits good output characteristics.

A novel linear piezo inertia actuator based on the transverse motion principle is proposed. Under the action of the transverse motion of two parallel leaf-springs, the designed piezo inertia actuator can achieve great stroke movements at a fairly high speed. The presented actuator includes a rectangle flexure hinge mechanism (RFHM) with two parallel leaf-springs, a piezo-stack, a base, and a stage. The mechanism construction and operating principle of the piezo inertia actuator are discussed, respectively. To obtain the proper geometry of the RFHM, we have used a commercial finite element program COMSOL. To investigate the output characteristics of the actuator, the relevant experiment tests including loading capacity, voltage characteristic, and frequency characteristic are adopted. The maximum movement speed and the minimum step size are 27.077 mm/s and 32.5 nm, respectively, confirming that the RFHM with two parallel leaf-springs can be used to design a piezo inertia actuator with a high speed and accuracy. Therefore, this actuator can be used in applications with fast positioning and high accuracy.