A fourth-order ΣΔ interface for micromachined inertial sensors

Petkov, V.; Boser, Bernhard E.

doi:10.1109/isscc.2004.1332723

Cited by 37 publications

(65 citation statements)

References 4 publications

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“…A well designed high order Δ∑ modulator based MEMS gyroscope can filter most of the noise from the Δ∑ modulator loop. For instance, the results obtained in (Petkov and Boser, 2005) proved that one can achieve a SNR of 93dB with a relatively low OSR of 500, including realistic values for electronic noise introduced.…”

Section: δ∑ Modulator Based Mems Gyroscope 51mentioning

confidence: 95%

1-Bit processing based model predictive control for fractionated satellite missions

Bai

2014

Acta Astronautica

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In this thesis, a 1-bit processing based Model Predictive Control (OBMPC) structure is proposed for a fractionated satellite attitude control mission. Despite the appealing advantages of the MPC algorithm towards constrained MIMO control applications, implementing the MPC algorithm onboard a small satellite is certainly challenging due to the limited onboard resources. The proposed design is based on the 1-bit processing concept, which takes advantage of the affine relation between the 1-bit state feedback and multi-bit parameters to implement a multiplier free MPC controller.As multipliers are the major power consumer in online optimization, the OBMPC structure is proven to be more efficient in comparison to the conventional MPC implementation in term of power and circuit complexity. The system is in digital control nature, affected by quantization noise introduced by Δ∑ modulators. The stability issues and practical design criteria are also discussed in this work.Some other aspects are considered in this work to complete the control system. Firstly, the implementation of the OBMPC system relies on the 1-bit state feedbacks. Hence, 1-bit sensing components are needed to implement the OBMPC system. While the ∆∑ modulator based Microelectromechanical systems (MEMS) gyroscope is considered in this work, it is possible to implement this concept into other sensing components.Secondly, as the proposed attitude mission is based on the wireless inter-satellite link (ISL), a state estimator is required. However, conventional state estimators will once again introduce multi-bit signals, and compromise the simple, direct implementation of the OBMPC controller. Therefore, the 1-bit state estimator is also designed in this work to satisfy the requirements of the proposed fractionated attitude control mission.The simulation for the OBMPC is based on a 2U CubeSat model in a fractionated satellite structure, in which the payload and actuators are separated from the controller and controlled via the ISL. Matlab simulations and FPGA implementation based performance analysis shows that the OBMPC is feasible for fractionated satellite missions and is advantageous over the conventional MPC controllers. V VI

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Section: δ∑ Modulator Based Mems Gyroscope 51mentioning

confidence: 95%

1-Bit processing based model predictive control for fractionated satellite missions

Bai

2014

Acta Astronautica

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“…The system shown in Fig. 1 includes a heavy compensation with a transfer function of H c ðzÞ ¼ 1 À 0:9z À1 in discrete-time z-domain, which is used to stable the system by positioning the zeros closer to the open-loop poles of the filter, resulting in an increase of the amount of phase lead [6]. In Fig.…”

Section: Sensing Element and Systemmentioning

confidence: 99%

Design analysis of a high-Q micromechanical capacitive accelerometer system

Chen

2017

IEICE Electron. Express

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A micromechanical capacitive accelerometer system is analyzed in this paper, which includes a high-Q sensing element and a high-order switched-capacitor (SC) sigma-delta ΣΔ CMOS interface circuit. The high-Q high-order topology obtained a sub-µg/√Hz noise floor. The loop stability is implemented by the operation of electrostatic feedback force, heavy phase compensation and the off-chip adjusting of distributed-feedback factors. The interface circuit is implemented in a standard 0.5 µm CMOS process. The system consumes 12 mW from a single 5 V supply with the noise level of lower than 400 ng/√Hz. The system bandwidth is 600 Hz and the input range of the accelerometer is ²0.7 g. The measured sensitivity of 2.5 V/g is achieved.

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“…In micromechanical accelerometers, since the mechanical bandwidth is usually quite small (<2 kHz), AEÁ conversion can effectively reduce noise and improve overall performance. Because MEMS accelerometers have good compatibility with CMOS process, the research on AEÁ interface circuit of micro-machined accelerometers have significant theoretical value and applied benefit [6,7].…”

Section: Introductionmentioning

confidence: 99%

Study of closed-loop high-resolution sigma-delta for a MEMS accelerometer

Sun

Yin²,

Li³

et al. 2018

IEICE Electron. Express

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In this paper, a high-resolution Sigma-Delta (ΣΔ) modulator in a standard 0.5 µm CMOS technology for a MEMS accelerometer is presented. The digital output is attained by the interface circuit based on a low-noise front-end charge-amplifier and a back-end forth-order Sigma-Delta modulator. The low-noise front-end detection circuit is proposed with correlated double sampling (CDS) technique to eliminate the 1/f noise and offset of operational amplifier. The capacitance compensation array is used for rejecting the sensor element mechanical offset. The lead compensator circuit is to ensure the stability of the high-order closed-loop system. The interface is fabricated in a standard 0.5 µm CMOS process and the active circuit area is about 8 mm 2 . The MEMS accelerometer system consumes 25 mW from a single 7 V supply at a sampling frequency of 250 kHz. The ΣΔ modulator can achieve an effective number of bits 20.30 bits and an average noise floor in low-frequency range of 140 dB.

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A fourth-order ΣΔ interface for micromachined inertial sensors

Cited by 37 publications

References 4 publications

1-Bit processing based model predictive control for fractionated satellite missions

1-Bit processing based model predictive control for fractionated satellite missions

Design analysis of a high-Q micromechanical capacitive accelerometer system

Study of closed-loop high-resolution sigma-delta for a MEMS accelerometer

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