A free-space method for measurement of complex permittivity of silicon wafers at microwave frequencies

Baba, Noor Hasimah; Awang, Zaiki; Ghodgaonkar, D.K.

doi:10.1109/apace.2003.1234483

Cited by 9 publications

(6 citation statements)

References 6 publications

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“…Silicon (Si) and gallium arsenide (GaAs) materials are the most used material candidates because of their process management and costs. In this paper, we selected silicon as the most representative candidate for efficient demonstration in electronic systems, relying on its mature integrated technology [ 21 ], as well as for its broad optical absorption frequency band and coefficient inducing a micrometer-scale light penetration depth of this material, compared to other photoconductive materials [ 22 ].…”

Section: Introductionmentioning

confidence: 99%

Millimeter-Wave Permittivity Variations of an HR Silicon Substrate from the Photoconductive Effect

Tripon‐Canseliet¹,

Chazelas²

2022

Micromachines

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The photoinduced microwave complex permittivity of a highly resistive single-crystal silicon wafer was extracted from a bistatic free-space characterization test bench operating in the 26.5–40 GHz frequency band under CW optical illumination at wavelengths of 806 and 971 nm. Significant variations in the real and imaginary parts of the substrate’s permittivity induced by direct photoconductivity are reported, with an optical power density dependence, in agreement with the theoretical predictions. These experimental results open the route to ultrafast system reconfiguration of microwave devices in integrated technology by an external EMI-protected and contactless control with unprecedented performance.

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Section: Introductionmentioning

confidence: 99%

Millimeter-Wave Permittivity Variations of an HR Silicon Substrate from the Photoconductive Effect

Tripon‐Canseliet¹,

Chazelas²

2022

Micromachines

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“…Several materials have been successfully characterized using MNDT in our previous reports [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

“…In MNDT, the complex permittivity values are extracted from the reflection and transmission coefficients (S 11 and S 12 ) which are measured for normally incident plane waves. The equations relating the quantitites are deliberated in [11].…”

Section: Introductionmentioning

confidence: 99%

Microwave non-destructing testing of rubber at X-band

Affendi

Alias

Awang

et al. 2013

2013 IEEE International RF and Microwave Conference (RFM)

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In this paper, the measurement of complex dielectric constant of natural rubber at microwave frequencies is reported. A free space, non-destructive technique was used to measure the parameter for several rubber samples at X band. The samples were prepared using different amounts of carbon filler to alter the dielectric properties so that the relation between filler content and ε r can be investigated. Our studies show that ε r and tan δ increase with the filler content. In addition, ε r showed a decreasing trend, while tan δ increased with frequency.

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“…In medical applications, the electromagnetic characterization of materials is used for the monitoring of physiological events in the human body [1], the characterization of benign and malignant breast tissues [2], breast cancer detection [3], and studying the influence of microwaves on the human body [4]. Within the design of electronic circuits, material characterization has been used to design high-quality polymers for terahertz components [5] and to perform quality assurance of silicon wafers for integrated circuit design [6]. In agriculture and quality control of food, material characterization has been used to determine physical properties (i.e., moisture content, bulk density, and temperature) of cereal grain and seed [7] and contamination detection in cheddar cheese and beef [8].…”

Section: Introductionmentioning

confidence: 99%

A Comprehensive Error Analysis of Free-Space Techniques for Extracting the Permeability and Permittivity of Materials Using Reflection-Only Measurements

Fenner¹,

Shah²

2021

PIER M

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The electromagnetic characterization of layered materials is applicable to many different applications. In previous work it has been shown that reflection-only techniques -which vary the underlying structure of the sample stack to obtain two independent measurements -are a variation of a single unifying scheme such that there is a single set of closed-form unifying extraction equations for the electric permittivity and magnetic permeability. In this paper, the error propagation method is applied to this single set of closed-form extraction equations in order to derive an accompanying set of closed-form equations to predict the measurement uncertainty of electric permittivity and magnetic permeability. An error analysis is performed on the layer-shift method, and results are compared to a Monte Carlo simulation to prove the viability of the general error analysis equations.

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A free-space method for measurement of complex permittivity of silicon wafers at microwave frequencies

Cited by 9 publications

References 6 publications

Millimeter-Wave Permittivity Variations of an HR Silicon Substrate from the Photoconductive Effect

Millimeter-Wave Permittivity Variations of an HR Silicon Substrate from the Photoconductive Effect

Microwave non-destructing testing of rubber at X-band

A Comprehensive Error Analysis of Free-Space Techniques for Extracting the Permeability and Permittivity of Materials Using Reflection-Only Measurements

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