2013
DOI: 10.1109/jlt.2013.2285382
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A Fully-Integrated Flexible Photonic Platform for Chip-to-Chip Optical Interconnects

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Cited by 61 publications
(36 citation statements)
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“…The SU-8 membrane can be delaminated from the handler substrate after detector fabrication to form free-standing flexible devices. This process, which has previously been adopted for flexible ChG photonic device fabrication by the authors [61][62][63][64][65] , capitalizes on the low deposition and processing temperatures of ChG's to facilitate direct integration on polymers which typically cannot withstand temperatures above 250 °C. The Ge23Sb7S70 glass waveguide dimensions are as follows: ridge width 0.8 m, slab thickness 0.13 m and ridge height 0.3 m.…”
Section: Section XII -Fabrication and Characterization Of Flexible Wamentioning
confidence: 99%
“…The SU-8 membrane can be delaminated from the handler substrate after detector fabrication to form free-standing flexible devices. This process, which has previously been adopted for flexible ChG photonic device fabrication by the authors [61][62][63][64][65] , capitalizes on the low deposition and processing temperatures of ChG's to facilitate direct integration on polymers which typically cannot withstand temperatures above 250 °C. The Ge23Sb7S70 glass waveguide dimensions are as follows: ridge width 0.8 m, slab thickness 0.13 m and ridge height 0.3 m.…”
Section: Section XII -Fabrication and Characterization Of Flexible Wamentioning
confidence: 99%
“…Some ChG applications (i.e. diffraction gratings, waveguides) require the material to be in thin film form [4,5,[7][8][9][10][11][12]. Current standard methods for thin film deposition of ChG include thermal evaporation, sputtering, pulsed laser deposition and spin-coating [13,14].…”
Section: Introductionmentioning
confidence: 99%
“…The coupling of light between chips and light sources contributes to a considerable portion of the total link budget for any low-power optical modulator approach, and therefore has to be realized via an efficient and compact method [23]- [27].…”
Section: Integrated Optical Fabricsmentioning
confidence: 99%