2014
DOI: 10.1109/tcad.2014.2351273
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A Fuzzy-Matching Model With Grid Reduction for Lithography Hotspot Detection

Abstract: In advanced IC manufacturing, as the gap increases between lithography optical wavelength and feature size, it becomes challenging to detect problematic layout patterns called lithography hotspot. In this paper, we propose a novel fuzzy matching model which extracts appropriate feature vectors of hotspot and nonhotspot patterns. Our model can dynamically tune appropriate fuzzy regions around known hotspots. Based on this paper, we develop a fast algorithm for lithography hotspot detection with high accuracy of… Show more

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Cited by 68 publications
(2 citation statements)
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“…For comparison, we employ the convolutional neural network ResNet to predict the capacitance matrix. A density-based data representation method [11,29] is used to describe the geometric characteristics of the metal layer and represents the input of ResNet. This method can effectively describe the layout feature [23].…”
Section: Density-based Data Representationmentioning
confidence: 99%
“…For comparison, we employ the convolutional neural network ResNet to predict the capacitance matrix. A density-based data representation method [11,29] is used to describe the geometric characteristics of the metal layer and represents the input of ResNet. This method can effectively describe the layout feature [23].…”
Section: Density-based Data Representationmentioning
confidence: 99%
“…To address these issues, researchers have used fuzzy techniques to integrate into machine learning called Fuzzy Machine Learning [1] (FML) as a solution, since fuzzy techniques are successful to deal with uncertainties. FML systems fuse machine learning algorithms with fuzzy techniques, such as fuzzy sets [2], fuzzy systems [3], fuzzy clustering [4], fuzzy relations [5], fuzzy measures [6], fuzzy matching [7], fuzzy optimization [8], and so on, to build new models that are more robust to the many and varied types of uncertainty found in real-world problems.…”
Section: Introductionmentioning
confidence: 99%