A global assessment of piezoelectric actuated micro-pumps

Abstract

Abstract. This article provides an extensive outlook of different types of piezoelectric actuated micropumps published in the literature recently. We start by reminding the reader about the conventional operating parameters used to quantify the capabilities of these devices. After this introductory stage, we describe and classify the most prominent micro-pump's geometries found with piezoelectric actuation. At this point we identify the parameters given previously for each pump in order to establish a subsequent discussion in which the trends of different families are compared. Specific attention is given to the particularities of each case namely: flow rates and backpressures.

Energy Constrained Transport Maximization across a Fluid Interface

“…at which the boundary is kept fixed. Another strategy would be to have cross-channels fed via flow pumps or syringes [14][15][16] with the channel boundaries being the P i and Q i , and each channel's flow being out of phase with the adjacent channels. A third design possibility for electrorheological fluids would be to use oscillating electromagnetic fields [17][18][19][20].…”

“…In the ''Simulations and Discussion'' section, numerical simulations with a cellular flow are used to demonstrate both excellent quantitative agreement with the theory and the fact that competing strategies result in smaller flux. Several protocols (boundary membrane pulsation [12,13], cross-channel flow [14][15][16], and electromagnetic fields [17][18][19][20]) for achieving this optimal transport are suggested.…”

Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems

“…It consists of a long plate of aluminium excited at one end by a high-frequency piezoactuator which is aimed to be implemented in a micro-pump [31]. On this surface, our setup features a 9.2 mV/µm sensitivity and a theoretical resolution of 17 nm peak-to-peak.…”

Improving Output Performance of a Resonant Piezoelectric Pump by Adding Proof Masses to a U-Shaped Piezoelectric Resonator

“…Piezoelectric pumps basically utilize the reciprocating deformation of piezoelectric actuators to transport liquid [6], and can be mainly divided into reciprocating pumps [7], peristaltic pumps [8], traveling wave pumps [9], centrifugal pumps [10], and some new kinds of pumps [11,12], according to different working principles. Among them, reciprocating pumps are most reported in literatures, including diaphragm pumps and piston type pumps.…”