Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems

Perret, Luc; Chassagne, Luc; Topçu, S.; Ruaux, P.; Cagneau, Barthelemy; Alayli, Yasser

doi:10.1016/j.sna.2010.10.010

Cited by 22 publications

(13 citation statements)

References 26 publications

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“…Optical encoders can achieve a resolution of few nanometers by digitally interpolating the diffraction fringes [12], but the practical small signal-noise-ratio limits the resolution. Laser-interferometerbased sensors, such as Fabry-Perot and Michelson interferometers, are extensively used as displacement sensors and calibration tools due to their high precision, good stability, repeatability, and antielectromagnetic interference [13]. For instance, a sensor based on a fiber-optic Fabry-Perot cavity was proposed by Chen et al to detect the displacement, which has a resolution of 16 nm as well as a linear response and a wide bandwidth [11].…”

Section: Introductionmentioning

confidence: 99%

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Wang

Bai

et al. 2015

Appl. Opt.

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A subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation is proposed and experimentally demonstrated in this paper. The grating interferometric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror. To realize a subnanometer resolution, the intensity compensation and phase modulation technique are introduced, which are achieved by an intensity compensation light path, three closed placed photodetectors, a processing circuit and a piezoelectric ceramic transducer, and a lock-in amplifier. The intensity compensation technique can improve the stability of the output intensity signal greatly while the phase modulation technique can increase the signal-tonoise ratio dramatically. The detected signal is intensity modulated and processed by a particular arithmetic circuit. Experimental results indicate that the sensitivity of this displacement sensor is 44.75 mV/nm and the highest resolution can reach 0.017 nm, which is 27 times better than the one without intensity compensation and phase modulation. As a high-performance sensor with immunity to electromagnetic interference, this displacement sensor has potential to be used in nanoscience and technology.

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Section: Introductionmentioning

confidence: 99%

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Wang

Bai

et al. 2015

Appl. Opt.

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“…Among these, for industrial applications, the interferometric detectors stands out due to their high sensitivity and their ability to detect on rough surfaces [10]. However, its cost is high as is the complexity of the setup [2,11]. An alternative to the interferometer is the intensity modulated fiber optic sensor, which can have a high sensitivity, can be low cost and simple.…”

Section: Introductionmentioning

confidence: 99%

“…Besides the laser ultrasonics application (the motivation of this work), typical applications of this sensor could be reflective surface angle measurements itself, as a microphone or hydrophone (with a suitable diaphragm or membrane), for acoustic emission sensing, characterization of piezoelectric actuators, pulse-echo monitoring, measurement of ultrasonic velocity and attenuation, and as part of an atomic force microscope (AFM) [2,11,26].…”

Section: Introductionmentioning

confidence: 99%

High sensitivity fiber optic angular displacement sensor and its application for detection of ultrasound

Sakamoto¹,

Kitano

Pacheco

et al. 2012

Appl. Opt.

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In this paper, we report on the development of an intensity-modulated fiber-optic sensor for angular displacement measurement. This sensor was designed to present high sensitivity, linear response, and wide bandwidth and, furthermore, to be simple and low cost. The sensor comprises two optical fibers, a positive lens, a reflective surface, an optical source, and a photodetector. A mathematical model was developed to determine and simulate the static characteristic curve of the sensor and to compare different sensor configurations regarding the core radii of the optical fibers. The simulation results showed that the sensor configurations tested are highly sensitive to small angle variation (in the range of microradians) with nonlinearity less than or equal to 1%. The normalized sensitivity ranges from 0.25 × V max to 2.40 × V max mV ∕ μrad (where V max is the peak voltage of the static characteristic curve), and the linear range is from 194 to 1840 μrad. The unnormalized sensitivity for a reflective surface with reflectivity of 100% was measured as 7.7 mV ∕ μrad. The simulations were compared with experimental results to validate the mathematical model and to define the most suitable configuration for ultrasonic detection. The sensor was tested on the characterization of a piezoelectric transducer and as part of a laser ultrasonics setup. The velocities of the longitudinal, shear, and surface waves were measured on aluminum samples as 6.43, 3.17, and 2.96 mm ∕ μs, respectively, with an error smaller than 1.3%. The sensor, an alternative to piezoelectric or interferometric detectors, proved to be suitable for detection of ultrasonic waves and to perform time-of-flight measurements and nondestructive inspection.

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“…Also, these systems include conductive targets and the attractive force between the target and the sensor probe should be considered for precision applications [18]. While miniature versions using fiber-optic cables have become available recently, their integration within compact nanopositioning systems remains a challenge [19]. Strain gauges and piezoelectric sensors have also been used to measure displacement [20,21].…”

Section: Introductionmentioning

confidence: 99%

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

et al. 2017

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We analyzed the parameter effects of an optical knife-edge sensor (OKES) and the measurement uncertainty to achieve high linearity, long range, and high accuracy for nanopositioning stage applications. The OKES utilizes interference fringes produced from diffraction across the knife-edge. The total field at the detector was calculated from superposition of the incident field and the diffracted field at the knifeedge, and the edge diffraction effects on the sensor design parameters (distance between the knife-edge and detector, wavelength and beam diameter) were investigated by using a design of experiment (DOE), 3-Level L 9 matrix from the Taguchi Method. Multi-factor experiments were designed to determine the relationship between factors affecting the interferogram and the sensor linearity. It was found that a shorter knife edge-detector distance, shorter wavelength, and larger beam diameter show high signal-tonoise ratio for sensing linearity. The OKES was modeled by using the electromagnetic wave propagation principle, and it was experimentally verified by controlling the positioning of an XY nanopositioning stage by the OKES. The sensor noise level showed X 20.1 nm and Y 19.4 nm, and the fundamental sensing limits of the OKES were estimated to be X 0.19 nm/ and Y 0.23 nm/ for a ±1.0 mm working range. These results indicate that the OKES can be a good alternative to other precision metrology tools because of its large working range, positioning accuracy, resolution, linearity, and bandwidth, as well as its compact size and low cost.

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Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems

Cited by 22 publications

References 26 publications

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

High sensitivity fiber optic angular displacement sensor and its application for detection of ultrasound

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

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