A grazing-incidence reflectometer for BL-39XU at SPring-8

Abstract

A new grazing-incidence re¯ectometer has been designed for the X-ray undulator beamline BL-39XU at SPring-8. It will be used for analytical applications, especially ultra-trace-level determination by total re¯ection X-ray¯uorescence (TXRF), nanometerscale surface topography by specular/non-specular X-ray re¯ec-tion, and thin-®lm interface studies by combined measurements of X-ray¯uorescence and X-ray re¯ection. The requirements for the instrument and the solutions in the present design are discussed. A prototype has been developed to test the feasibility of the design. It has been con®rmed that the measurements planned at the beamline are achievable with this re¯ectometer.

X-ray fluorescence spectrometry

“…213 The design of a new high brilliance VUV and soft X-ray source for the University of Tokyo was described 214 and a grazing incidence re¯ectometer for an undulator beamline at Spring-8 intended for TXRF experiments, for example, was presented. 215 Optical components for focusing X-rays were described by Snigirev et al, 216,217 who used compound refractive lenses (of Al, B, Be and C) for sub-micrometre focusing for energies higher than 5 keV at ESRF. A tuneable bent Laue monochromator, where the ®rst crystal was plane and the second one was bent and its angle kept constant to make the device stable against vibrations, was used at NSLS.…”