A grounded coplanar waveguide with a metallized silicon cavity fabricated by front-surface-only processes

Yoshida, Y.; Nishino, Tamotsu; Jiao, Jiwei; Lee, Sang-Seok; Suehiro, Y.; Miyaguchi, K.; Fukami, T.; Kimata, Masafumi; Ishida, Osami

doi:10.1016/j.sna.2003.10.011

Cited by 10 publications

(10 citation statements)

References 9 publications

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“…The dispersion loss of CPW (George et al 1999;Yoshida et al 2004): the coplanar waveguide (CPW) is a fundamental and important element for MMIC due to its ease of mounting active devices. However, as frequency increases, the CPW suffers from dispersion loss determined by air-dielectric material discontinuity which is inherent to substrate supported transmission lines.…”

Section: Frequency Dependent Characteristicmentioning

confidence: 99%

A voltage source model on thermoelectric power sensor based on MEMS technology

Wang

Liao

2011

Microsyst Technol

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In order to achieve monolithic integration of thermoelectric power sensor and its amplification system and improve the measurement accuracy of microwave power, a voltage source model is researched in this paper. And the thermoelectric power sensor is designed and fabricated using MEMS technology and GaAs MMIC process. It is measured in the X-band (8-12 GHz) with the input power in 100 mW range. When the input microwave power is at 10, 50 and 100 mW, respectively, the frequency dependent coefficient k 1 is -0.073, -0.39 and -0.82 mV/ GHz, respectively. The sensitivity coefficient k 2 is 0.311, 0.303, 0.293, 0.284 and 0.279 mV/mW at 8, 9, 10, 11 and 12 GHz, respectively, and has an excellent linearity. Based on the voltage source model, the feedback coefficient of its amplification system is set to 0.0078 9 P in to compensate the loss power caused by frequency dependent characteristic. In addition to miniaturization and low cost, an advantage using this model is significantly improved measurement accuracy.

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Section: Frequency Dependent Characteristicmentioning

confidence: 99%

A voltage source model on thermoelectric power sensor based on MEMS technology

Wang

Liao

2011

Microsyst Technol

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“…MEMS suspended structures within RF/microwave circuit components including transmission lines, switches and filters have exhibited very low loss without substratewave modes and dispersion [1], [2]. However, with limited thermal conduction paths, they suffer from low power handling capability owing to the localized heat generated in the metallic structures.…”

Section: Introductionmentioning

confidence: 99%

Skin effect aggregated heating in RF MEMS suspended structures

Chow

Wang

Jensen

et al. 2005

IEEE MTT-S International Microwave Symposium Digest, 2005.

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This paper presents experimental data together with 2 modeling approaches to demonstrate the increased heating of MEMS suspended structures at radio frequencies due to skin effects. Distinguishable average temperature rises are measured at 2, 13.5, and 18 GHz in a 616 µm x 20 µm x 2.7 µm suspended coplanar waveguide using 4-wire measurement configuration. Our measurements compare well with: (1) previous electromagnetic simulations and (2) a newly introduced analytical thermal model incorporating only skin effects. Buckling and plastic yielding have been observed during and after measurement. This study provides a simple and quantitative approach for the design of suspended structures such as low loss transmission lines, filters and switches with high power handling capability.

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“…. Commonly used configurations of suspended MEMS transmission-line structures: (a) microshield structure with two bonded wafers and backside through-wafer etching [7]; (b) single-wafer frontside-etched microshield structure with vias on a thin membrane [8]; (c) single-wafer frontside-etched microshield structure without membrane; (d) suspended structure with/without dielectric support posts [21]; (e) fixed-fixed beam switch; and (f) down-state cantilever beam switch. and there is a wide variety of other RF microelectromechanical systems (MEMS) devices incorporating their structures, including LC passives [10], [11], filters [12], [13], power dividers [14], [15], mixers [16], [17], varactors [18], [19], couplers [20], [21], phase shifters [22], [23], resonators [24], [25], diplexers [24], oscillators [1], [24], parametric amplifiers [26], impedance tuners [27], [28], frequency selective surfaces [29], [30], and antennas [31], [32].…”

mentioning

confidence: 99%

Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures

Chow

Wang²,

Jensen

et al. 2006

J. Microelectromech. Syst.

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Air-suspension of transmission-line structures using microelectromechanical systems (MEMS) technology provides the effective means to suppress substrate losses for radio-frequency (RF) signals. However, heating of these lines augmented by skin effects can be a major concern for RF MEMS reliability. To understand this phenomenon, a thermal energy transport model is developed in a simple analytical form. The model accounts for skin effects that cause Joule heating to be localized near the surface of the RF transmission line. Here, the model is validated through experimental data by measuring the temperature rise in an air-suspended MEMS coplanar waveguide (CPW). For this measurement, a new experimental methodology is also developed allowing direct current (dc) electrical resistance thermometry to be adopted in an RF setup. The modeling and experimental work presented in this paper allow us to provide design rules for preventing thermal and structural failures unique to the RF operation of suspended MEMS transmission-line components. For example, increasing the thickness from 1 to 3 m for a typical transmission line design enhances power handling from 5 to 125 W at 20 GHz, 3.3 to 80 W at 50 GHz, and 2.3 to 56 W at 100 GHz (a 25-fold increase in RF power handling). [1737] Index Terms-Coplanar waveguides (CPWs), failure analysis, microelectromechanical devices, skin effect, transmission lines. I. INTRODUCTION L OW-LOSS and low-dispersion transmission-line structures are critical components in radio-frequency (RF)/microwave circuit design. Air-suspended transmission-line structures, with their suspension above the commonly used complementary metal-oxide-semiconductor (CMOS) or GaAs substrates, can serve as fundamental building blocks to achieve low-loss, low-noise signal transmission for monolithic integration of RF circuits and devices [1]-[5]. They often form microshield transmission lines [6]-[9] as shown in Fig. 1(a)-(c),

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A grounded coplanar waveguide with a metallized silicon cavity fabricated by front-surface-only processes

Cited by 10 publications

References 9 publications

A voltage source model on thermoelectric power sensor based on MEMS technology

A voltage source model on thermoelectric power sensor based on MEMS technology

Skin effect aggregated heating in RF MEMS suspended structures

Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures

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