A High Bandwidth Sigma-Delta Modulator Applied in Micro-Gyroscope

Fu, Qiang; Chen, Wei Ping; Chen, Song; Wang, Peng Fei; Liu, Xiao Wei

doi:10.4028/www.scientific.net/kem.562-565.369

Cited by 3 publications

(3 citation statements)

References 6 publications

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“…6 shows an extract of the switched capacitor implementation of the modulator. There are some parts of electronic, for instance, although four integrators are embedded into the CRFF [3] modulator structures, the first and second integrators are shown in Fig. 6, the third and the fourth integrators are the same as the others and are omitted in Fig.6.…”

Section: Fig5 the Root Locus Of The Modulatormentioning

confidence: 99%

A High Performance ASIC Interface for MEMS Gyroscope

Mao¹,

Liu²,

Wang³

et al. 2018

Proceedings of the 2018 7th International Conference on Energy and Environmental Protection (ICEEP 2018)

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This paper presents the ASIC design and implementation for micro-machined gyroscope, The ASIC interface is including an analog ASIC and a digital ASIC, and can afford driving closed-loop, On-chip reference generation, CIC and IIR filter chain, High performance MEMS gyroscope output detection. The two ASICs are implemented in 0.18µm HVCMOS technology operates with a single 5V supply. The ASIC employ a 4th-order CRFF architecture for achieving high SNR performance. The sampling frequency of the SDM is 2 MHz. And filter chain (including CIC and IIR)with the mechanical sensor element to reject the excessive in-band quantization noise and the resonance signal in the sense of the Gyroscope. The C/V conversion is implemented with continuous capacitance detection , and 4th-order sigma-delta modulator is implemented with switched-capacitor techniques, The gyroscope`s resonance frequency is locked by PLL, and constant drive amplitude in a closed loop system.

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Section: Fig5 the Root Locus Of The Modulatormentioning

confidence: 99%

A High Performance ASIC Interface for MEMS Gyroscope

Mao¹,

Liu²,

Wang³

et al. 2018

Proceedings of the 2018 7th International Conference on Energy and Environmental Protection (ICEEP 2018)

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show abstract

“…Compared with traditional ADC, such as dual slope ADC, successive approximation ADC, parallel comparison ADC etc. , sigma-delta ADC has the advantages of low power consumption, high precision, high flexibility and ease to achieve in ASIC [ 180 ]. On the other hand, in order to improve the performance in terms of resolution and lower sensitivity against temperature and process variations, the open-loop readout cannot satisfy the future markets demand.…”

Section: Micromachined Gyroscope Circuitrymentioning

confidence: 99%

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Xia

Kong

2014

Sensors

195

107

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This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

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“…Through detailed simulation by using Matlab and Cadence, the characteristics of algorithm and circuit of the modulator are obtained, while the impact of the modulator on the whole gyroscope system is not presented. The modulator achieved an SNR of 92.3dB and effective number of bits is 15.03 bits [1].…”

Section: Introductionmentioning

confidence: 99%

Design of a Digitalized Microgyroscope System Using <inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta $ </tex-math></inline-formula> Modulation Technology

Xia

Kong

et al. 2015

IEEE Sensors J.

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This paper presents a digitalized gyroscope system using ΣΔ modulation on ADC and DAC sections. Both discrete ADC and DAC chips are replaced with these ΣΔ sections. The ΣΔ ADC technology can convert signals between analog and digital domain using analog modulators on the PCB(Printed Circuit Board) circuit with different amplifiers and matched capacity couples and digital backend processing in Field Programmable Gate Array (FPGA). While the ΣΔ ADC technology are easily realized in FPGA by signal processing algorithms, the major sections of the digital system such as auto-gain control(AGC) and PLL(phase-lock loop) are also implemented in FPGA, which have provided the programmable flexibility of the whole system. The signal to noise ratio (SNR) of power spectrum density (PSD) and stability in both ΣΔ ADC and ΣΔ DAC are analyzed, respectively. Considering the sections of the ΣΔ ADC and DAC woks in different clock domain, the frequency characteristics of each section should be analyzed. In the drive mode of the gyroscope, the force feedback is applied through the direct bitstream of the modulator. To evaluate the gyroscope vibration stability of the ΣΔ modulation based system, the Leeson-model phase noise characteristics of the drive mode detection signal are in-depth theoretically calculated with different parameters including the noise models and the circuit components, which has been experimentally validated by the measured PSD analysis. Finally, the performance evaluation of the whole gyroscope system is demonstrated by time domain sampling and Allan variance analysis. 1 The digitalized system achieved a scale factor of 94LSB/°/s, with a linearity of 83.1 ppm, noise of , bandwidth is 75Hz and the bias instability is 2.94°/hr.

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A High Bandwidth Sigma-Delta Modulator Applied in Micro-Gyroscope

Cited by 3 publications

References 6 publications

A High Performance ASIC Interface for MEMS Gyroscope

A High Performance ASIC Interface for MEMS Gyroscope

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Design of a Digitalized Microgyroscope System Using <inline-formula> <tex-math notation="LaTeX">$\Sigma \Delta $ </tex-math></inline-formula> Modulation Technology

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