A High-Consistency Broadband MEMS-Based Electrochemical Seismometer With Integrated Planar Microelectrodes

Sun, Zhenguo; Li, Guanglei; Chen, Lianhong; Chen, Deyong; Wang, Junbo; Chen, Jian

doi:10.1109/ted.2017.2728101

Cited by 10 publications

(3 citation statements)

References 21 publications

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“…Several scientific groups develop and test planar structures executed at a high technological level. One of the groups [38][39][40][41] makes multi-crystal devices with bilateral metallization (Fig. 5, Fig.…”

Section: Modeling and Design Of Devicesmentioning

confidence: 99%

Technology and application оf electrochemical motion sensors

Krishtop

Zhevnenko

Gornev

et al. 2021

Advanced Materials Proceedings

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In this paper, we consider technology and application of electrochemical transducers (ECT). Electrochemical systems are very promising for the development of a new element base for microelectronics. One of the most important directions is the design of micro-sized electrochemical acceleration and pressure sensors, and one of the most promising technologies is electrochemical transfer. Electrochemical transducers are very sensitive and energy-efficient and best suited for measuring weak mechanical movements. The basic principle consist in the following: microelectrodes are formed on a silicon chip and the chip is placed in a container with liquid electrolyte. Under the influence of an external mechanical signal, the electrolyte liquid starts moving (by inertia or by pressure) and transfers ions between the electrodes. The generated electric current is proportional to the external mechanical signal. We have developed a new microelectronic technology for electrochemical transducers, and have designed new instruments based on new electrochemical microelectronic chips. Currently, ECTs are applied for a variety of engineering tasks. ECTs are used to record the ground oscillation in the railway, in the tsunami early warning system, in electrochemical hydrophones for sea-bottom stations and for geoexploration systems, in the precise azimuth determination inertial systems.

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Section: Modeling and Design Of Devicesmentioning

confidence: 99%

Technology and application оf electrochemical motion sensors

Krishtop

Zhevnenko

Gornev

et al. 2021

Advanced Materials Proceedings

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“…The telluric movements generate elastic waves on the surface of the earth with frequencies below the millihertz and up to 30 Hz, higher frequencies are attenuated promptly after traveling short distances [1]. The seismometers are the key sensing elements to detect seismic signals in the fields of geophysical prospection and seismic monitoring [2]. A variety of seismometers were developed, such as the electromagnetic moving-coil seismometers [3], capacitive seismometers [4], optical fiber seismometers [5], micro-electromechanical systems (MEMS) seismometers [6], and electrochemical seismometers [7,8].…”

Section: Introductionmentioning

confidence: 99%

Measurement of low frequency mechanical vibrations based on an inverted magnetic pendulum

Awad¹,

Orozco²,

Hoyos³

2019

IJECE

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<span>In this paper is presented the mathematical model, design and construction of a prototype of a vibration frequency meter in an adjustable range of 2 Hz to 30 Hz; The experimental results and their analysis are also presented, making a comparative evaluation with the theoretical model. The device is based on the principle of resonance applied in an inverted magnetic pendulum whose natural frequency can be modified by variations of physical parameters. The oscillation of the pendulum is recorded detecting variations in the magnetic field using hall effect sensors; the data recorded with a microprocessor is analyzed and the results are simultaneously plotted in a computer interface. The data obtained were processed to be plotted in the frequency domain, facilitating its analysis. It was proved that the prototype can be used as a frequency meter and that the adjustable character of the device works according to the mathematical model. Finally, The effect of the friction force was studied, it was concluded that the friction force affects the measurement after a considerable period of time of oscillation, but not in the first moments.</span>

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“…An ultra-high-sensitivity accelerometer is required due to the weak variations of gravity signals. Silicon-based MEMS (micro-electromechanical system) technology has been proven to be a feasible approach toward high-resolution inertial sensors with a stable mechanical structure, low structure dissipation, small size and potentially low cost [ 4 , 5 , 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

Zheng

Liu

et al. 2017

Sensors

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Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement.

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A High-Consistency Broadband MEMS-Based Electrochemical Seismometer With Integrated Planar Microelectrodes

Cited by 10 publications

References 21 publications

Technology and application оf electrochemical motion sensors

Technology and application оf electrochemical motion sensors

Measurement of low frequency mechanical vibrations based on an inverted magnetic pendulum

High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

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