A High Density Hollow Cathode Plasma PECVD Technique for Depositing Films on the Internal Surfaces of Cylindrical Substrates

Abstract

A novel technique for depositing thick diamond‐like carbon‐based films on the internal surface of cylindrical substrates, like pipes, tubes and valves, has been developed. Plasma assisted chemical vapour deposition technology is used to generate a high density hollow cathode plasma within the pipe using asymmetric direct current pulse biasing. The pipe itself is the vacuum and plasma chamber. A description of the general properties of the films, as well as the excellent corrosion resistant properties will be discussed. It is believed that the described film can increase the component life in applications where internal surfaces are exposed to highly corrosive and abrasive media.

Alternative tribological coatings to electrodeposited hard chromium: a critical review

“…High velocity spray was pioneered by Browning in 1982 who utilised an oxygen-fuel mixture expanding in a combustion chamber and accelerating through a convergent-divergent nozzle to deposit a powder feedstock [27] which powder is injected into a hot gas stream and accelerated onto a substrate at high velocities and moderate gas temperatures (2600-3000°C) [22]. The resultant coating is generally dense with a high bond strength (48)(49)(50)(51)(52)(53)(54)(55)(56)(57)(58)(59)(60)(61)(62) and low porosity (<1-2%). It has been a dominant thermal spraying process for hard chromium replacement coatings [20].…”

“…Figure 5b) shows nanocrystalline WC carbide particles embedded in aluminium doped amorphous DLC. As shown in Table 2, the friction coefficient of DLC against steel is 10 times less than EHC [44,[47][48][49][50][51]. Vetter has contributed a review of boron-doped diamond (BDD) coatings [52].…”

“…Thicker coatings are obviously advantageous for tribological applications. A novel technique for depositing thick diamond-like carbon-based films has been developed and patented by Sub-one who utilised plasma enhanced CVD (PECVD) technology to generate high density hollow cathode plasma [51]. The coating thickness can reach as thick as 80 μm and the deposition temperature on the substrate is below 200°C, due to the use of a gaseous plasma.…”

A novel high-power pulse PECVD method

“…The hollow cathode approach has previously been utilized in PECVD processes for the deposition of amorphous carbon films and the process has been studied both by experiments and modeling [7] and up-scaling by the use of an array of hollow cathodes has been demonstrated [8]. Coating of the inside of metallic tubes with amorphous carbon has been done by using the tube itself as a hollow cathode and introducing the process gases in the tube [9]. The hollow cathode PECVD method has also been used for amorphous CN films [10].…”

Caracterização e desempenho de um filme de carbono amorfo hidrogenado tipo diamante (a-C:H) dopado com silício, aplicado em camisa de cilindro de motor à combustão interna

“…A deposição do filme DLC nas camisas de cilindro foi conduzida por uma empresa externa (Sub-One Technology), que é detentora da patente do processo, e já suportou uma série de trabalhos científicos como foi o os casos de LUSK et al (2009) e REJOWSKI et al (2012) FIGURA -Camisa HD com filme DLC na superfície interna. FIGURA 47 -Camisa HD1 cortada em duas metades, lados A e B.…”