A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication

Olsson, Roy H.; Hattar, Khalid Mikhiel; Homeijer, Sara Jensen; Wiwi, Michael; Eichenfield, Matthew; Branch, Darren W.; Baker, Michael; Nguyen, Janet; Clark, Blythe; Bauer, Travis; Friedmann, Thomas A.

doi:10.1016/j.sna.2014.01.033

Cited by 104 publications

(32 citation statements)

References 18 publications

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“…However high quality single crystal LN-film is yet to be demonstrated. Consequently, researchers generally rely on ion-slicing methods [7], [8], [14]. But the high energy ions used for slicing the thin-film may degrade the thin-film quality.…”

Section: Fabricationmentioning

confidence: 99%

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Design and Fabrication of S<sub>0</sub> Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators

Wang

Bhave

Bhattacharjee

2015

J. Microelectromech. Syst.

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Commercial markets desire integrated multifrequency band-select duplexer and diplexer filters with a wide fractional bandwidth and steep roll-off to satisfy the ever-increasing demand for spectrum. In this paper, we discuss the fabrication and design of lithium niobate (LN) thin-film S 0 Lamb-wave resonators on a piezoelectric-on-piezoelectric platform. Filters using these resonators have the potential to fulfill all the above requirements. In particular, we demonstrated one-port highorder S 0 Lamb-wave resonators with resonant frequencies from ∼400 MHz to ∼1 GHz on a black rotated y-136 cut LN thin film. The effective electromechanical coupling factor (k 2 ef f ) ranges from 7% to 12%, while the measured quality factor ranges from 600 to 3300. The highest k 2 ef f × Q achieved on this chip is 194, significantly surpassing contour mode resonators manufactured in other technologies.[2014-0280]

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Section: Fabricationmentioning

confidence: 99%

“…2) have been proposed by our group [6], the Sandia group [7], and the CMU group [8]. The resonant frequency of such devices are primarily defined by their lateral dimension, which can be accurately controlled by photolithography.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of S<sub>0</sub> Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators

Wang

Bhave

Bhattacharjee

2015

J. Microelectromech. Syst.

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“…Due to the simplicity and ease of set-up of the single-transducer AE system, it can be easily integrated into many ion beam modification research and development efforts. For example, the inclusion of a transducer during a Smart Cut process would allow beam parameters to be determined for new material systems beyond single crystals (Si, 87 SiC, 88 LiNbO 3 89 ), for new crystal orientations, or for differing layer thicknesses from a single experiment where cleavage is directly resolved in time. This implementation would save scores of ion implantation runs and significantly reduce time to commercialization.…”

Section: Future Directionsmentioning

confidence: 99%

Listening to Radiation Damage In Situ: Passive and Active Acoustic Techniques

Dennett

Choens

Taylor

et al. 2019

JOM

Self Cite

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Knowing when, why, and how materials evolve, degrade, or fail in radiation environments is pivotal to a wide range of fields from semiconductor processing to advanced nuclear reactor design. A variety of methods, including optical and electron microscopy, mechanical testing, and thermal techniques, have been used in the past to successfully monitor the microstructural and property evolution of materials exposed to extreme radiation environments. Acoustic techniques have also been used in the past for this purpose, although most methodologies have not achieved widespread adoption. However, with an increasing desire to understand microstructure and property evolution in situ, acoustic methods provide a promising pathway to uncover information not accessible to more traditional characterization techniques. This work highlights how two different classes of acoustic techniques may be used to monitor material evolution during in situ ion beam irradiation. The passive listening technique of acoustic emission is demonstrated on two model systems, quartz and palladium, and shown to be a useful tool in identifying the onset of damage events such as microcracking. An active acoustic technique in the form of transient grating spectroscopy is used to indirectly monitor the formation of small defect clusters in copper irradiated with self-ions at high temperature through the evolution of surface acoustic wave speeds. These studies together demonstrate the large potential for using acoustic techniques as in situ diagnostics. Such tools could be used to optimize ion beam processing techniques or identify modes and kinetics of materials degradation in extreme radiation environments.

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“…Its advantages can be enumerated as follows. First, an assortment of acoustic modes with large electromechanical coupling (K 2 ) can be excited in thin-film LiNbO3 [29]- [31], e.g., fundamental symmetric (S0) [32]- [36], fundamental shear horizontal (SH0) [37]- [41], and first-order antisymmetric (A1) modes [42]- [45]. They permit much wider bandwidth transduction between the acoustic and electrical domains than state of the art at RF.…”

Section: Introductionmentioning

confidence: 99%

Low-Loss Unidirectional Acoustic Focusing Transducer in Thin-Film Lithium Niobate

Yang

Gong

2020

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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In this work, we present gigahertz low-loss unidirectional acoustic focusing transducers in thin-film lithium niobate. The design follows the anisotropy of fundamental symmetric (S0) waves in X-cut lithium niobate. The implemented acoustic delay line testbed consisting of a pair of the proposed transducers shows a low insertion loss of 4.2 dB and a wide fractional bandwidth of 7.5% at 1 GHz. The extracted transducer loss is 1.46 dB, and the propagation loss of S0 waves is 0.0126 dB/μm. The design framework is readily extendable to other acoustic modes, given consideration on the optimal orientation for power flow and electromechanical transduction.

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A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication

Cited by 104 publications

References 18 publications

Design and Fabrication of S<sub>0</sub> Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators

Design and Fabrication of S<sub>0</sub> Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators

Listening to Radiation Damage In Situ: Passive and Active Acoustic Techniques

Low-Loss Unidirectional Acoustic Focusing Transducer in Thin-Film Lithium Niobate

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