A high-precision temperature measurement system based on noise cancellation

Yixi, Fang; Lei, Kaizhuo; Zhang, Qunfei; Huang, Qiang; Fan, Zhibo

doi:10.1109/tencon.2013.6718505

Cited by 4 publications

(5 citation statements)

References 1 publication

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“…Table 2 shows the results of error fitting for (1) temperature measurement errors of ±5 °C with the maximum pressure measurement error of 364.29 Pa, over ±0.018% FS; (2) temperature measurement errors of ±1 °C with the maximum pressure measurement error of 217.74 Pa, higher than ±0.01% FS and (3) temperature measurement errors of ±0.01 °C with the maximum pressure measurement error of −195.54 Pa. To meet the accuracy requirement of pressure measurements, the accuracy of temperature sensors should be higher than ±0.01 °C. Since the temperature chamber’s control accuracy cannot be ignored and the size of the temperature sensor should be small enough to be positioned close to the pressure-sensitive microsensor, in this study, PT1000 was used as the temperature sensor featured with high accuracy in a temperature measurement less than ±0.01 °C from −40 °C to 85 °C [ 31 ].…”

Section: Temperature Compensation Methods Based On Differential Outmentioning

confidence: 99%

A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

Xiang

Yan

et al. 2020

Micromachines

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This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive diagram and two resonant beams (electromagnetic driving and electromagnetic induction) to produce a differential output. The resonators were vacuum packaged with a silicon-on-glass (SOG) cap using anodic bonding and the wire interconnection was realized by sputtering an Au film on highly topographic surfaces using a hard mask. After the fabrication of the resonant pressure microsensor, systematic experiments demonstrated that the pressure sensitivity of the presented microsensor was about 0.33 kPa/Hz. Utilizing the differential frequency of the two resonators and the signal from a temperature sensor to replace the two-frequency signals by polynomial fitting, the temperature compensation method based on differential outputs aims to increase the surface fitting accuracy of these microsensors which have turnover points. Employing the proposed compensation approach in this study, the errors were less than 0.02% FS of the full pressure scale (a temperature range of −40 to 85 °C and a pressure range of 200 kPa to 2000 kPa).

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Section: Temperature Compensation Methods Based On Differential Outmentioning

confidence: 99%

A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

Xiang

Yan

et al. 2020

Micromachines

View full text Add to dashboard Cite

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“…e TH = G TIA 4k B TR Z FB (19) To meet the noise requirement of 1 aF/Hz 1/2 [1], it is necessary for the total voltage noise to satisfy 353 nV/Hz 1/2 .…”

Section: Noise Analysis and Simulationmentioning

confidence: 99%

“…He analyzed the measurement model of the coaxial cables and the noise model incorporating stray capacitance, exploring the effects of the cables. Finally, he conducted experimental measurements to assess the noise level of the cables at 0.1 Hz [ 19 ]. In the context of weak signal detection, Fang Yixi proposed a method in which the combination of hardware compensation and the corresponding algorithm cancellation are used to overcome the noise drifts and improve the detection accuracy of the high-precision temperature measurement system [ 20 ].…”

Section: Introductionmentioning

confidence: 99%

“…He analyzed the measurement model of the coaxial cables and the noise model incorporating stray capacitance, exploring the effects of the cables. Finally, he conducted experimental measurements to assess the noise level of the cables at 0.1 Hz [19]. In the context of weak signal detection, Fang Yixi proposed a method in which The majority of current studies on the precision of capacitive displacement sensors primarily concentrate on noise reduction techniques, which are employed to enhance the detection accuracy of the sensors.…”

Section: Introductionmentioning

confidence: 99%

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Research on High-Precision Resonant Capacitance Bridge Based on Multiple Transformers

Liu,

Chen,

Wang

et al. 2024

Sensors

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The Taiji program is dedicated to the detection of middle and low-frequency gravitational waves, targeting the 0.1 mHz to 1 Hz frequency band. The project requires an acceleration residual sensitivity of 3 × 10−15 ms−2/Hz1/2, which necessitates a capacitance sensing resolution of 1 aF/Hz1/2 for the capacitive sensing system within the specified frequency range. The noise level of the resonant bridge significantly influences the resolution. Addressing the challenges in enhancing transformer performance parameters in existing resonant capacitance bridges and the constraints on improving the characteristics of resonant capacitance bridges, this study introduces a novel approach to reduce bridge thermal noise without optimizing existing parameters. The simulation results demonstrate that this scheme can reduce the noise to 0.7 times the original level and further reduce bridge thermal noise when other parameters affecting noise are optimized. This not only mitigates the demands for other performance parameters but also increases the range of maximum acceptable resonant frequency deviations and reduces its sensitivity to such variations. Experimental validation confirms that the proposed scheme effectively reduces noise by 0.7 times and improves the resolution of capacitance sensing to 0.6 aF/Hz1/2, thereby advancing the Taiji program gravitational wave detection capabilities.

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“…The resistance value of Pt1000 at 0 • C is 𝑅 0 = 1000 Ω, with 0 • C as the dividing line, the relationship between platinum resistance and temperature can be divided into two temperature ranges, the specific relationship is [17,18].…”

Section: The Principle and Structure Of Platinum Resistance Temperatu...mentioning

confidence: 99%

A novel high-accuracy platinum resistance flexible temperature chain for polar temperature field measurement

et al. 2020

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In order to effectively improve the accuracy of temperature measurement in the low temperature environment of the polar ice sheet, we designed a multi-point platinum resistance flexible temperature chain based on Pt1000, which has the advantages of low temperature resistance, low power consumption and high accuracy. The temperature chain consists of a master and multiple slaves. The master is used to read the entire temperature chain's data and make data exchange with the external equipment. The slave is used to collect and upload temperature data. RS485 bus communication is used between the master and slaves. The slave circuit directly measures the ratio of the bridge output voltage to the bridge input voltage to calculate the final temperature value, so the measurement accuracy is not affected by the fluctuation of the external power supply voltage. After the temperature measurement unit of each slave is calibrated using the least square method, when the temperature is greater than 0 • C, the temperature measurement error does not exceed 0.00134 • C, and when the temperature is less than 0 • C, the error does not exceed 0.07235 • C. In addition, low temperature experiments indoor as well as field tests have shown that the overall reliability of the temperature chain is higher for simultaneous temperature measurement at multiple points in the low temperature environment, which is suitable for detecting the temperature field profile of glacial ice and snow in the polar environment.

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A high-precision temperature measurement system based on noise cancellation

Cited by 4 publications

References 1 publication

A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

Research on High-Precision Resonant Capacitance Bridge Based on Multiple Transformers

A novel high-accuracy platinum resistance flexible temperature chain for polar temperature field measurement

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