A High Range-to-Resolution Multiaxis $\mu$Force and Torque Sensing Platform

Tiwari, Bhawnath; Blot, Mélissa; Laurent, Guillaume J.; Agnus, Joël; Sandoz, Patrick; Lutz, Philippe; Clevy, Cédric

doi:10.1109/tmech.2021.3071444

Cited by 3 publications

(2 citation statements)

References 24 publications

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“…Vision-based micro-force sensors are capable of measuring forces on the order of micronewtons or sub-micronewtons by capturing images of stiffness-calibrated elastic sensitive elements to obtain position information, deflection, displacement, or contour data [107]. As an illustration, Jing et al presented a micro-force-sensing mobile micro-robot combining a 2D vision-based micro-force sensor with a magnetic mobile micro-robot [108].…”

Section: Vision Micro-force Sensormentioning

confidence: 99%

Micro-force sensing techniques and traceable reference forces: a review

Yang

Zhao²,

Huang³

et al. 2022

Meas. Sci. Technol.

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Micro-force measurement with high resolution, accuracy, and reliability is of interest to a broad range of applications including gravitational wave detection, intelligent healthcare, bionic robot, and micromanipulation. Herein, the research development in recent years of micro-force sensors based on various principles is reviewed thoroughly, presenting the characteristics and applications, as well as summarizing their advantages and limitations. The indispensable component of force sensors, elastic sensitive elements, is underlined. Next, four kinds of not widely used but promising sensors are also introduced briefly. Finally, the traceable reference forces are analyzed, concluding with a future perspective into the corresponding challenges and opportunities of micro-force sensors for future research. This review aims at providing references for developing micro-force sensors and improving their performance.

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Section: Vision Micro-force Sensormentioning

confidence: 99%

Micro-force sensing techniques and traceable reference forces: a review

Yang

Zhao²,

Huang³

et al. 2022

Meas. Sci. Technol.

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“…This is, for example, the case for the gluing of sub-millimeter scale components [ 21 ], the achievement of manipulation tasks with dexterity [ 22 ], the characterization of single fibers [ 23 ], and the assembly of optical [ 24 ] or photonic components [ 25 ]. Multi-DoF force sensing such as [ 26 ] is thus expected to bring key knowledge for a precise positioning and diverse task handling capability, but the problem of the range of operation and according changes in frames during the tasks can introduce significant limitations to the system. To address this key issue, there is a requirement for an instrumented microgripper capable of multi-DoF force/position sensing which remains an open question.…”

Section: Introductionmentioning

confidence: 99%

A Two-Axis Piezoresistive Force Sensing Tool for Microgripping

Tiwari

Billot

Clevy

et al. 2021

Sensors

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Force sensing has always been an important necessity in making decisions for manipulation. It becomes more appealing in the micro-scale context, especially where the surface forces become predominant. In addition, the deformations happening at the very local level are often coupled, and therefore providing multi-axis force sensing capabilities to microgripper becomes an important necessity. The manufacturing of a multi-axis instrumented microgripper comprises several levels of complexity, especially when it comes to the single wafer fabrication of a sensing and actuation mechanism. To address these requirements, in this work, an instrumented two-axis force sensing tool is proposed, which can then be integrated with the appropriate actuators for microgripping. Indeed, based on the task, the gripper design and shape requirements may differ. To cover wide needs, a versatile manufacturing strategy comprising of the separate fabrication of the passive and sensing parts was especially investigated. At the microscale, signal processing brings additional challenges, especially when we are dealing with multi-axis sensing. Therefore, a proper device, with efficient and appropriate systems and signal processing integration, is highly important. To keep these requirements in consideration, a dedicated clean-room based micro-fabrication of the devices and corresponding electronics to effectively process the signals are presented in this work. The fabricated sensing part can be assembled with wide varieties of passive parts to have different sensing tools as well as grippers. This force sensing tool is based upon the piezoresistive principle, and is experimentally demonstrated with a sensing capability up to 9 mN along the two axes with a resolution of 20 μN. The experimental results validate the measurement error within 1%. This work explains the system design, its working principle, FEM analysis, its fabrication and assembly, followed by the experimental validation of its performance. Moreover, the use of the proposed sensing tool for an instrumented gripper was also discussed and demonstrated with a micrograsping and release task.

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An Overview of Microrobotic Systems for Microforce Sensing

Adam,

Boudaoud,

Reynaud

et al. 2024

Annual Review of Control, Robotics, and Autonomous Systems

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Considering microbotics, microforce sensing, their working environment, and their control architecture together, microrobotic force-sensing systems provide the potential to outperform traditional stand-alone approaches. Microrobotics is a unique way for humans to control interactions between a robot and micrometer-size samples by enabling the control of speeds, dynamics, approach angles, and localization of the contact in a highly versatile manner. Many highly integrated microforce sensors attempt to measure forces occurring during these interactions. However, they are highly difficult to predict because the forces strongly depend on many environmental and system parameters. This article discusses state-of-the-art microrobotic systems for microforce sensing, considering all of these factors. It starts by presenting the basic principles of microrobotic microforce sensing, robotics, and control. It then discusses the importance of microforce sensor calibration and active microforce-sensing techniques. Finally, it provides an overview of microrobotic microforce-sensing systems and applications, including both tethered and untethered microrobotic approaches. Expected final online publication date for the Annual Review of Control, Robotics, and Autonomous Systems, Volume 7 is May 2024. Please see http://www.annualreviews.org/page/journal/pubdates for revised estimates.

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A High Range-to-Resolution Multiaxis $\mu$Force and Torque Sensing Platform

Cited by 3 publications

References 24 publications

Micro-force sensing techniques and traceable reference forces: a review

Micro-force sensing techniques and traceable reference forces: a review

A Two-Axis Piezoresistive Force Sensing Tool for Microgripping

An Overview of Microrobotic Systems for Microforce Sensing

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