A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique

Zhao, Shuangshuang; Hou, Cong-Cong; Zhang, Juan; Bai, Jian; Yang, Guoguang

doi:10.1088/0957-0233/23/10/105102

Cited by 17 publications

(7 citation statements)

References 11 publications

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“…Compared to previous displacement sensors [19,21], the proposed displacement sensor is proved to have a higher subnanometer resolution of 0.017 nm, which is promising to be used in various fields like material science and biotechnology. In the future, a closed-loop unit can be employed so that the displacement sensor operates at the highest sensitivity point.…”

Section: Discussionmentioning

confidence: 99%

“…Besides, the ambient stray light I amb brought by other optical components is also a factor of the fluctuation of I in and I 1 . In previous reports [19,21], I in is always regarded as a constant. However, I in and I 1 are both variable quantities with random fluctuations brought by ambient conditions and the laser source itself.…”

Section: B Intensity Compensationmentioning

confidence: 99%

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Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Wang

Bai

et al. 2015

Appl. Opt.

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A subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation is proposed and experimentally demonstrated in this paper. The grating interferometric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror. To realize a subnanometer resolution, the intensity compensation and phase modulation technique are introduced, which are achieved by an intensity compensation light path, three closed placed photodetectors, a processing circuit and a piezoelectric ceramic transducer, and a lock-in amplifier. The intensity compensation technique can improve the stability of the output intensity signal greatly while the phase modulation technique can increase the signal-tonoise ratio dramatically. The detected signal is intensity modulated and processed by a particular arithmetic circuit. Experimental results indicate that the sensitivity of this displacement sensor is 44.75 mV/nm and the highest resolution can reach 0.017 nm, which is 27 times better than the one without intensity compensation and phase modulation. As a high-performance sensor with immunity to electromagnetic interference, this displacement sensor has potential to be used in nanoscience and technology.

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Section: Discussionmentioning

confidence: 99%

Section: B Intensity Compensationmentioning

confidence: 99%

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Wang

Bai

et al. 2015

Appl. Opt.

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“…On the one side, the encoders employ new configurations with more advanced elements so as to deliver superior count accuracy along with compact package dimensions [5][6][7]. On the other side, the utilization of more efficacious signal processing methods brings in stronger processing power, a higher resolution and higher alignment tolerances [8][9][10].…”

Section: Calibration Of Non-contact Incremental Linear Encoders Using...mentioning

confidence: 99%

Calibration of non-contact incremental linear encoders using a macro–micro dual-drive high-precision comparator

et al. 2015

Meas. Sci. Technol.

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The accuracy of a linear encoder is determined by encoder-specific errors, which consist of both long-range and cyclic errors. Generally, it is difficult to measure the two errors of a non-contact incremental linear encoder with a large measuring range and small signal period in one measurement because of the contradiction between long travel range and high resolution. To resolve this issue, a prototype high-precision interferometric comparator with a macro–micro dual-drive system is presented. The measurement and motion resolution of the comparator are 1 nm and 3 nm, respectively. A measuring range of 320 mm is realized and the theoretical maximum range of the comparator is 2 m. The comparator mainly includes a high-accuracy aerostatic linear-motion stage, a constant displacement ratio piezoelectric-driven stage, two laser interferometers, a 6-DOF grating pair position adjustment devices and a PC-based data processor. The measurable linear movement is afforded, respectively, by the long-stroke stage and the piezoelectric-driven stage for the long-range error and cyclic error measurement. The movement can be measured by the encoder and then be calibrated by the corresponding laser interferometer. In the experiment, the accuracy of a non-contact incremental linear encoder with a 20 μm-long signal period and 320 mm measuring range proposed by our team was calibrated after proper mounting. The long-range error is measured to be 3.123 μm, and the cyclic error is within ±0.159 μm, which matches well with the theoretical estimation given by ±0.145 μm. The measurement uncertainties are estimated and the results confirm the effectiveness and feasibility of the proposed scheme and instruments.

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“…When the object that the accelerometer is attached to is subjected to an acceleration, the proof mass in the elastic structure moves in the opposite direction relative to the substrate, with a displacement proportional to the acceleration. This leads to a sharp change in the output light intensity since the cavity, composed of a diffraction grating and a high reflective film, is very sensitive to the distance between the grating and the film [4,5].…”

Section: Introductionmentioning

confidence: 99%

Determination of thermally induced effects and design guidelines of optomechanical accelerometers

Bai

Wang

et al. 2017

Meas. Sci. Technol.

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Thermal effects, including thermally induced deformation and warm up time, are ubiquitous problems for sensors, especially for inertial measurement units such as accelerometers. Optomechanical accelerometers, which contain light sources that can be regarded as heat sources, involve a different thermal phenomenon in terms of their specific optical readout, and the phenomenon has not been investigated systematically. This paper proposes a model to evaluate the temperature difference, rise time and thermally induced deformation of optomechanical accelerometers, and then constructs design guidelines which can diminish these thermal effects without compromising other mechanical performances, based on the analysis of the interplay of thermal and mechanical performances. In the model, the irradiation of the micromachined structure of a laser source is considered a dominant factor. The experimental data obtained using a prototype of an optomechanical accelerometer approximately confirm the validity of the model for the rise time and response tendency. Moreover, design guidelines that adopt suspensions with a flat cross-section and a short length are demonstrated with reference to the analysis. The guidelines can reduce the thermally induced deformation and rise time or achieve higher mechanical performances with similar thermal effects, which paves the way for the design of temperature-tolerant and robust, high-performance devices.

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A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique

Cited by 17 publications

References 11 publications

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation

Calibration of non-contact incremental linear encoders using a macro–micro dual-drive high-precision comparator

Determination of thermally induced effects and design guidelines of optomechanical accelerometers

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