2010
DOI: 10.1088/2040-8978/13/1/015601
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A high sensitivity position-sensitive detector based on Au–SiO2–Si structure

Abstract: A novel position-sensitive detector (PSD) based on the metal–oxide–semiconductor (MOS) structure, which is simply fabricated by an n-type Si substrate, a thin native SiO2 layer and an Au film, is reported in this work. This detector shows a large lateral photovoltage (LPV) with high sensitivity and good linearity. Furthermore, the LPV of this structure greatly depends on the incident angle of the light, suggesting some extra potential for the development of new types of waveguide-like devices.

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Cited by 15 publications
(13 citation statements)
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“…It can also be seen from Figure f that LPE performs diversely on different semiconductor substrates. As mentioned above, different metal films and thickness induce diverse spectral response and sensitivity, demonstrating the importance of the categories and configurations of metal materials on the photoelectric performance of MS or MOS systems …”
Section: Lateral Photovoltaic Effectmentioning
confidence: 95%
“…It can also be seen from Figure f that LPE performs diversely on different semiconductor substrates. As mentioned above, different metal films and thickness induce diverse spectral response and sensitivity, demonstrating the importance of the categories and configurations of metal materials on the photoelectric performance of MS or MOS systems …”
Section: Lateral Photovoltaic Effectmentioning
confidence: 95%
“…Линейные зависимости ЛФЭ наблюдались и в МОП структурах на основе n-Si с пленками металлов Co [8,12,13], Ti [13], Au [14], Fe 3 O 4 [17], Ni [18]. Такие зависимости характеризуются чувствительностью κ = d(LPV )/dx [13,16]…”
Section: методика экспериментаunclassified
“…ЛФЭ возникает при неравномерном освещении pn-перехода в результате латеральной диффузии и рекомбинации фотогенерированных электроннодырочных пар [1][2][3][4]. Подобный эффект также исследовался в структурах металл−полупроводник (МП) [6][7][8][9][10][11] и металл−оксид−полупроводник (МОП) [12][13][14][15][16][17][18]. Этот эффект применяется в позиционно-чувствительных детекторах, поскольку при смещении светового пятна латеральное фотонапряжение меняется линейно [1,4,5].…”
Section: Introductionunclassified
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“…In tracking or remote measurement systems, high sensitivity and ultra-weak light detection capability are crucial, which determine the accuracy and operating distance of the systems. Heterojunction structures, including silicon (Si) P-N or P-I-N junctions [5,6], and metal-Si Schottky junctions [7][8][9][10], are the most common structures for current PSD. The sensitivity of these devices is still not satisfactory and they normally operate under μW or mW incident light.…”
Section: Introductionmentioning
confidence: 99%