A high-sensitivity reconfigurable integrating dual-slope CDC for MEMS capacitive sensors

Sanjurjo, J. P.; Prefasi, E.

doi:10.1109/prime.2015.7251356

Cited by 2 publications

(3 citation statements)

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“…This paper presents an extension of the work reported in [ 7 ], showing measurements from a fabricated prototype. In order to be area and energy efficient the proposed architecture is based on the noise-shaping integrating dual-slope (DS) topology of [ 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 89%

“…The possible output digital values are in the range from −M to M. However, there are two different “0”, “0+” and “0−”. To compensate this, an extra digital logic is needed (two different approaches were already shown in [ 7 , 9 ]), increasing the area and power consumption of the converter.…”

Section: Cdc With Self-oscillated Noise-shaping Integrating Dual Smentioning

confidence: 99%

“…Instead, the DAC keeps toggling until the next sampling period. In [ 7 ] it was demonstrated that by adopting this modification the final value of the voltage in the output of the integrator at the end of the sampling period (end of phase II; Ф II in Figure 5 B) still represents the quantization error. This way, the quantification error is noise-shaped, the same way as in the architecture of Figure 4 B.…”

Section: Cdc With Self-oscillated Noise-shaping Integrating Dual Smentioning

confidence: 99%

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A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications

Sanjurjo

Prefasi

Buffa

et al. 2017

Sensors

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The use of MEMS sensors has been increasing in recent years. To cover all the applications, many different readout circuits are needed. To reduce the cost and time to market, a generic capacitance-to-digital converter (CDC) seems to be the logical next step. This work presents a configurable CDC designed for capacitive MEMS sensors. The sensor is built with a bridge of MEMS, where some of them function with pressure. Then, the capacitive to digital conversion is realized using two steps. First, a switched-capacitor (SC) preamplifier is used to make the capacitive to voltage (C-V) conversion. Second, a self-oscillated noise-shaping integrating dual-slope (DS) converter is used to digitize this magnitude. The proposed converter uses time instead of amplitude resolution to generate a multibit digital output stream. In addition it performs noise shaping of the quantization error to reduce measurement time. This article shows the effectiveness of this method by measurements performed on a prototype, designed and fabricated using standard 0.13 µm CMOS technology. Experimental measurements show that the CDC achieves a resolution of 17 bits, with an effective area of 0.317 mm2, which means a pressure resolution of 1 Pa, while consuming 146 µA from a 1.5 V power supply.

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