A high speed impact actuator using multilayer piezoelectric ceramics

Development of PZT powders by wet chemical method and fabrication of multilayered stacks/actuators

“…The soft dopants facilitate the domain wall motion; thereby, the electronic properties of these PZTs are very high compared to undoped PZTs. The soft PZTs are widely used for various applications, such as actuators and sensors [10][11][12][13][14], sonar transducers [15], accelerometers [16], in drug delivery systems, in smart toilets, in gas igniters, in inkjet printers [17], etc. The use of PZT materials is unlimited because these materials can be prepared with a wide range of properties by varying the compositions with different dopants.…”

Miniature piezoelectric actuators: design concept, fabrication and performance evaluation

“…To achieve large motion, Chang andWang (1988, 1990) first invented a piezoelectric impact hammer, which was designed by using the waveguide concept. Lee and Wu (1993) later improved this particular mechanism.…”

“…Compared to laminated bimorph types of miniature piezoelectric actuator, devices based on piezoelectric stack actuators are gaining ever more emphasis due to their capabilities to output significantly more force. Piezoelectric stack actuators stacking piezoelectric layers into a stack to reduce the voltage level needed to obtain the same amount of displacement/force use the d 33 mode (Chang and Wang 1988, 1990, Lee and Wu 1993, Wu and Lee 1994a. As piezoelectric stack actuators do not have the geometric effect on their side similar to that of the bimorph type of actuator, methodologies that transform the large-force, small-displacement characteristics of piezoelectric actuators need to be developed further to facilitate the use of these types of actuator.…”

“…Design examples based on this design concept will be examined in detail. Four devices powered by using piezoelectric stack actuators and designed by using a waveguide, the lever principle and resonant effects (Chang and Wang 1988, 1990, Lee and Wu 1993, Wu and Lee 1994a will be presented to illustrate this line of thinking within the NTU MEMS Collective. A newly developed laser Doppler interferometry system specifically designed for piezoelectric micro-actuators is also examined.…”

Dielectric, ferroelectric and piezoelectric properties of (1 − x)[Pb0.91La0.09(Zr0.60Ti0.40)O3]–x[Pb(Mg1/3Nb2/3)O3], 0 ≤ x ≤ 1

“…Lead zirconate titanates (PZTs) [Pb(Zr 1-x Ti x )O 3 ] have been studied extensively in the last three to four decades since the system permits to prepare large number of compositions with varied dielectric and piezoelectric properties and these materials are widely used for various applications such as actuators and sensors [1][2][3][4][5], as sonar transducers [6], as accelerometers [7], as gas igniters, in drug delivery systems, in smart toilets, in inkjet printers [8], etc. Similarly, lead magnesium niobate (PMN) [Pb(Mg 1/3 Nb 2/3 )O 3 ] is a relaxor ferroelectric material with high dielectric constant and large electric field-induced strain [9][10][11][12][13].…”