Miniature piezoelectric actuators: design concept, fabrication and performance evaluation

Lee, C K; Chang, Shuo‐Hung; Chang, Pei‐Zen

doi:10.1088/0964-1726/7/3/007

Cited by 8 publications

(5 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As expected, the C-block does not produce as much force as the biggest stack or as much deflection as a series of thin THUNDER actuators; instead, the C-block gives performance in the midrange. C-blocks compare very well with straight benders, which are currently one of the most popular piezoelectric actuator architectures (Lee et al 1998). Not only are C-blocks capable of greater force output than a straight bender, but they are also capable of a greater deflection output, primarily due to the array structure of C-block architectures.…”

Section: Absolute Metricsmentioning

confidence: 96%

Preparation and Magnetooptical Properties of AlN–Fe Granular Film

Haga

Nakaya

Takeda

et al. 2001

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

C-blocks are unique piezoelectric building blocks which can be combined in series or parallel to generate tailorable performance and exploit the advantages of bender and stack architectures. This paper presents a complete theoretical model that predicts the force-deflection behavior for any generic C-block actuator array configuration. An experimental investigation with five case studies is described that validates the model over a broad range of actuator prototypes and performance. This study characterizes the sensitivity of this class of actuator array with respect to material, geometric, and configuration parameters. The paper concludes with a comparison of the generic C-block architecture to the current state of art on a basis of absolute measures such as maximum force, deflection, and work and normalized measures such as effective stress, strain, and work per actuator volume. From this, it is concluded that C-blocks are a highly efficient, mid-range actuation technology.

show abstract

Section: Absolute Metricsmentioning

confidence: 96%

Preparation and Magnetooptical Properties of AlN–Fe Granular Film

Haga

Nakaya

Takeda

et al. 2001

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…By inducing highly repeatable mechanical impact pulses to the specimen, an ultraprecision piezoelectric hammer [38] developed at the Institute of Applied Mechanics, National Taiwan University, was utilized to obtain sub-micrometer positioning accuracy and a sub-microsecond timing accuracy. This specially designed highly repeatable impact hammer was used to make sure that each holographic interferometric data obtained corresponds to different mechanical pulses can be regard as the result of the same pulse.…”

Section: Dynamic Wave-propagation Measurement Systemmentioning

confidence: 99%

Photorefractive crystal-based holographic interferometry system for full-field wave propagation metrology

Liou

Lee

2007

Opt. Express

View full text Add to dashboard Cite

Although, photorefractive materials have been discovered for many years, research using pulsed laser as the light source and photorefractive material as the recording media to record a pulsed laser hologram have been scarce despite its vast application potential. A newly proposed optical configuration which adopts a Nd:YAG pulsed laser of 532nm wavelength as the light source and uses an iron-doped lithium niobate crystal as the recording media for holographic recording of an undeformed specimen is presented. Real-time holographic interferometry was achieved by inducing repetitive impacts on the specimen through a precise piezoelectric impact hammer.With timing control better than microseconds, several interferograms created at each instance were obtained with each corresponding 9ns laser pulse. A five-step phase-shifting technology, median filter algorithm, and weighted iterative DFT phase unwrap algorithm were integrated to reconstruct the deformation information at each instance. Using a series of measured deformation data, surface wave propagation phenomenon on the specimen could be observed. Some of the potential applications for this newly developed pulsed laser holographic interferometry system are detailed.

show abstract

“…These potential problems are eliminated by using piezoelectric disks. Lee et al (1998) presented an extensive study on thin film piezoelectric actuators that includes information on their design, fabrication, and experimental techniques.…”

Section: Microfluidic Devicesmentioning

confidence: 99%

Design, fabrication, and characterization of thin film PZT membranes for high flux electronics cooling applications

Arık¹,

Zürn²,

Bar‐Cohen³

et al. 2005

Smart Mater. Struct.

View full text Add to dashboard Cite

An extensive numerical and experimental study of deep reactive ion etched (DRIE) thin film Pb(Zr, Ti)O 3 (PZT) membranes used to enhance heat transfer between an immersed integrated circuit and a dielectric fluid is presented. Modal and harmonic analysis of the vibrating PZT membranes was performed using finite element techniques for a frequency range from 0 to 5 MHz. Experimental and numerical results showed that as the size of the PZT membranes increased, their fundamental resonance frequency decreased and they exhibited an increase in the number of resonance points in a given frequency range. Square and rectangular PZT membranes showed similar resonant characteristics, while elliptic membranes displayed more resonant points than circular devices. For a specified frequency range and equivalent surface areas, square membranes had more resonant points than circular membranes. When the thin film PZT membranes are immersed in a dielectric fluid, substantial vortices and turbulences, along with distinct particle flow paths, were observed.

show abstract

Miniature piezoelectric actuators: design concept, fabrication and performance evaluation

Cited by 8 publications

References 26 publications

Preparation and Magnetooptical Properties of AlN–Fe Granular Film

Preparation and Magnetooptical Properties of AlN–Fe Granular Film

Photorefractive crystal-based holographic interferometry system for full-field wave propagation metrology

Design, fabrication, and characterization of thin film PZT membranes for high flux electronics cooling applications

Contact Info

Product

Resources

About