Design, fabrication, and characterization of thin film PZT membranes for high flux electronics cooling applications

Arık, Mehmet; Zürn, S.; Bar‐Cohen, Avram; Polla, Dennis L.

doi:10.1088/0964-1726/14/6/017

Cited by 5 publications

(5 citation statements)

References 34 publications

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“…, the effect of the electrode on deflection of the PZT layers will be ignored [13]. The axisymmetric governing equations can be obtained by utilizing LaGrange method as follows:…”

Section: Dynamic Modelmentioning

confidence: 99%

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Vibration Analysis Of A Double Circular Pzt Actuator For A Valveless Micropump

Parsi¹,

Zhang²,

Mašek³

2018

Progress in Canadian Mechanical Engineering

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In the conventional mechanical micropumps, the motion from one component (such as gear or diaphragm) produces pressure difference, which is needed to move fluid. In this paper, we propose a new method to use double PZT layers as an actuator for a valveless micropump, which is designed for pumping blood. Due to the high surface tension of blood, one PZT actuator is not strong enough to produce sufficient displacement. So instead of one PZT layer, a double-PZT layer is utilized to produce movement force. In this research, the analytic equations of a double circular PZT layer are derived to express the natural frequency of the system. The finite element method (FEM) simulation is utilized to verify the analytic equations. Then the required input voltage is applied to maximize the functionality of the system, whose simulation results are compared with the experimental measurement setup. Finally, a typical valveless micropump with the proposed double PZT layer is simulated by using COMSOL Multiphysics software. The flow rate of this configuration is compared with a single PZT actuator to demonstrate the effect of the proposed double-PZT actuator on the application to the valveless micropumps.

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“…, the effect of the electrode on deflection of the PZT layers will be ignored [13]. The axisymmetric governing equations can be obtained by utilizing LaGrange method as follows:…”

Section: Dynamic Modelmentioning

confidence: 99%

“…( 1 ) = 0 or ( ) = 0 (13) where is the root of Bessel function. Now by solving this simple algebraic equation, natural frequencies of the system can be calculated.…”

Section: Dynamic Modelmentioning

confidence: 99%

Vibration Analysis Of A Double Circular Pzt Actuator For A Valveless Micropump

Parsi¹,

Zhang²,

Mašek³

2018

Progress in Canadian Mechanical Engineering

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“…erz=eθz=0. (3) Impact of the electrodes layer on the deflection is neglected since its thickness is less than 0.5 μm [25]; the viscoelastic nature of the bonding layer is neglected [26]. (4) Electric potential is assumed to be evenly distributed along the thickness of the PZT layer.…”

Section: Analytical Modelingmentioning

confidence: 99%

“…Thus, X(τ) is expanded as, (24) Substituting Eq. (24) into (23) results in (25) where . The solution of Eq.…”

Section: Theory Of Vibrationmentioning

confidence: 99%

A theoretical solution of resonant circular diaphragm-type piezoactuators with added mass loads

Liang

Wang

2017

Sensors and Actuators A: Physical

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A theoretical solution is formulated to analyze the vibration behaviors of circular diaphragm-type piezoactuators based on the Hamilton's principle and Rayleigh-Ritz method, which are particular suitable for modeling the deflection of multilayer structures. Each of the actuator three layers is considered as an individual layer in the modeling. The energy associated with the solution includes the kinetic energy of the actuator, the elastic potential energy of the various layers, the electric potential energy in the piezodisc, and the work done by the force of electric filed. The transverse displacement is separated into a time dependence term and a mode shape term, then the vibrational governing equation is derived using the functional variation, and is approximately solved through the method of multiple scales. Moreover, added mass loads are introduced to the diaphragm center for the sake of decreasing the resonant frequency, where many MEMS devices, such as gas micropumps and ejectors, have a higher working efficiency. The proposed analytical solution is validated numerically via the finite element method (FEM) and experimentally via measurements; the theoretical results are found to be in good agreement with the FEM results as well as with the experimental results. Furthermore, the effects of mass loads, geometric dimensions and material properties of the piezoactuator on the resonant frequency are discussed.

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“…PZT) single layer bends inwards as a micropump. 13 This action can push fluid out of the chamber through the outlet valve. In the suction mode, when the voltage is removed, the PZT layer would back up to allow the fluid to enter the chamber.…”

Section: Introductionmentioning

confidence: 99%

Design and optimization of piezoelectric actuators for microflap-embedded micropumps

Parsi

Abouzarkhanifard

Zhang

2023

Advances in Mechanical Engineering

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In this paper, we propose a new method to use cost-effective multi-sheet off-the-shelf piezoelectric material (e.g. PZT) as an actuator for micropumps. Instead of one customized single PZT sheet that is typically expensive, multiple commercially available PZT sheets are utilized to decrease the cost of fabrication. For this purpose, we have derived analytic equations for expressing the natural frequency and mode shape of the actuator. The FEM simulations are utilized to verify the analytic equations. Thanks to their high accuracy, we can utilize the derived analytic equations as fitness functions of genetic algorithm (GA) for the optimization purpose of PZT physical aspects. Our experimental measurement results show that the GA is capable of optimizing multiple physical parameters of the piezoelectric actuator. Moreover, one-way compliant microflaps are presented for the first time to act as one-way valves for a PZT micropump aided by our proposed multi-sheet PZT actuator. The flow rate of this configuration is compared with a single-sheet PZT actuator in order to demonstrate the effect of the optimized PZT actuators in the practical applications of micropumps.

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Design, fabrication, and characterization of thin film PZT membranes for high flux electronics cooling applications

Cited by 5 publications

References 34 publications

Vibration Analysis Of A Double Circular Pzt Actuator For A Valveless Micropump

Vibration Analysis Of A Double Circular Pzt Actuator For A Valveless Micropump

A theoretical solution of resonant circular diaphragm-type piezoactuators with added mass loads

Design and optimization of piezoelectric actuators for microflap-embedded micropumps

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