2017
DOI: 10.3390/s17102412
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A High-Temperature MEMS Surface Fence for Wall-Shear-Stress Measurement in Scramjet Flow

Abstract: A new variant of MEMS surface fence is proposed for shear-stress estimation under high-speed, high-temperature flow conditions. Investigation of high-temperature resistance including heat-resistant mechanism and process, in conjunction with high-temperature packaging design, enable the sensor to be used in environment up to 400 °C. The packaged sensor is calibrated over a range of ~65 Pa and then used to examine the development of the transient flow of the scramjet ignition process (Mach 2 airflow, stagnation … Show more

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Cited by 3 publications
(1 citation statement)
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“…(26,27). Under conditions of high temperature and stress, the performance of stress-sensing chips may be compromised (26,(28)(29)(30). The most fundamental issue that needs to be resolved is how to successfully integrate conventional materials demanding high-temperature and high-stress manufacturing alongside chips unable to withstand such conditions.…”
Section: Embedding Obstaclesmentioning
confidence: 99%
“…(26,27). Under conditions of high temperature and stress, the performance of stress-sensing chips may be compromised (26,(28)(29)(30). The most fundamental issue that needs to be resolved is how to successfully integrate conventional materials demanding high-temperature and high-stress manufacturing alongside chips unable to withstand such conditions.…”
Section: Embedding Obstaclesmentioning
confidence: 99%