2020
DOI: 10.1002/adma.202002608
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A Highly Conductive Titanium Oxynitride Electron‐Selective Contact for Efficient Photovoltaic Devices

Abstract: High quality carrier-selective contacts with suitable electronic properties are a prerequisite for high power conversion efficiency (PCE) photovoltaic devices. In this work, an efficient electron-selective contact, titanium oxynitride (TiOxNy), is developed for crystalline silicon (c-Si) and organic photovoltaic devices. Atomic-layer deposited TiOxNy is demonstrated to be highly conductive with a proper work function (4.3 eV) and a wide band gap (3.4 eV). Thin Received: ((will be filled in by the editorial sta… Show more

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Cited by 62 publications
(74 citation statements)
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References 47 publications
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“…To achieve high-performance surface passivation, a-Si:H(i) passivating layer with optimized thickness of about 6 nm is deposited on the c-Si surface. [6,10,38] Figure 1c shows the effective minority carrier lifetime of symmetrically structured a-Si:H(i)/c-Si/a-Si:H(i) and CsX/a-Si:H(i)/c-Si/a-Si:H(i)/CsX contacts. After depositing thin a-Si:H(i) passivating layers (%6 nm) on the both sides, well-passivated interface with a low effective surface recombination velocity (S eff ) of about 3.9 cm s À1 is achieved.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…To achieve high-performance surface passivation, a-Si:H(i) passivating layer with optimized thickness of about 6 nm is deposited on the c-Si surface. [6,10,38] Figure 1c shows the effective minority carrier lifetime of symmetrically structured a-Si:H(i)/c-Si/a-Si:H(i) and CsX/a-Si:H(i)/c-Si/a-Si:H(i)/CsX contacts. After depositing thin a-Si:H(i) passivating layers (%6 nm) on the both sides, well-passivated interface with a low effective surface recombination velocity (S eff ) of about 3.9 cm s À1 is achieved.…”
Section: Resultsmentioning
confidence: 99%
“…For example, some metal oxides (e.g., titanium oxide, magnesium oxide, and tantalum oxide) and metal nitrides (e.g., titanium nitride, titanium oxynitride, and tantalum nitride) can form effective electron-selective contacts with n-type c-Si even if they do not have low work function. [30][31][32][33][34][35][36][37][38] This is mainly attributed to the thin silicon oxide (SiO x ) layers formed during the deposition processes, which can produce effective passivation on c-Si surface. Although high PCEs about 20% have been reported using these ETLs in c-Si solar cells, there is still room for further improvement.…”
Section: Doi: 101002/solr202000569mentioning
confidence: 99%
“…[24,25] This layer can also enhance carrier extraction out of silicon if the work function is suitable. [26,27] Here, an extra layer between silicon and rear electrode, for instance, MoO 3-x layer, has been used to passivate silicon rear surface and extract carriers (as illustrated in Figure 4a,b). [28,29] The peak output voltage of the device with the MoO 3-x interlayer is two times higher than that of the device without an interlayer, yielding a value of approximately 900 mV.…”
Section: Interfacial Effects On Friction-induced Carriersmentioning
confidence: 99%
“…Therefore, extensive efforts have been devoted to the improvement of silicon solar cells with dopant‐free passivating contacts. [ 4–9 ] By replacing a‐Si:H(p) with a 4 nm thick hole‐collecting and transparent molybdenum oxide (MoO x ) layer, a remarkable solar cell efficiency of 23.5% was recently demonstrated. [ 10 ] The integration of an a‐Si:H(i)/LiF x /Al electron selective contact at the rear side, instead of a‐Si:H(i)/ a‐Si:H(n)/ITO/Ag, [ 11 ] enabled the development of a fully dopant‐free silicon solar cell without any doped a‐Si:H layers or diffused p–n junctions.…”
Section: Introductionmentioning
confidence: 99%
“…[ 12,30 ] In that case, the contact resistance is potentially low to form a partial‐area heterocontact for dopant‐free bifacial silicon solar cells with a metal contact fraction between 10% and 50%. [ 31 ] In contrast to most electron transporting layers (0.5–10 nm), [ 6,9,13,20–24,27,32–34 ] a thick ZnO (60–140 nm) electron‐selective layer can additionally serve as a transparent antireflective coating (ARC), thus simplifying the fabrication process.…”
Section: Introductionmentioning
confidence: 99%