A highly sensitive and wide-range resonant magnetic micro-sensor based on a buckled micro-beam

Abstract

We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an inplane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing and the device is operating at atmospheric pressure. The magnetometer demonstrates a sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a good linearity in wide range and low power consumption around 0.2 mW. The above performances make the proposed micro-sensor promising for various low-cost magnetic applications.

Mass sensing by symmetry breaking and localization of motion in an array of electrostatically coupled nonlinear MEMS resonators

“…The drawback is the appearance of nonlinear behaviors that can generate adverse dynamical phenomena. However, recent studies tend to take advantage of these nonlinear effects [3][4][5][6][7][8]. For example, Nguyen et al investigated alternative mass-sensing techniques exploiting nonlinearities [9].…”

High Performance Micro Resonators-Based Sensors Using Multimode Excitation

“…However, these mentioned approaches are not so effective in activating higher-order modes, which are known to boost sensitivity and improve the performance of resonant gas sensors [16][17]. Previously [18][19], physical/chemical sensors with good response were realized when operating at the first mode. It was demonstrated that operating such sensors at the higher-order modes can lead to more improved accuracy and performance [20][21].…”

A novel piezoelectric-actuated microgripper simultaneously integrated microassembly force, gripping force and jaw-displacement sensors: design, simulation and experimental investigation

“…With the rapid development of micro-/nano-robot technology [1,2], lab on chip technology [3,4], micro-optoelectromechanical system technology [5,6], inertial constraint fusion (ICF) micro-target technology [7,8], and micro-sensor technology [9], the need for microassembly technology is becoming more and more obvious. In addition, most of microparts required by these technologies have complex threedimensional (3D) geometric structure and are made of different materials, and microassembly technology is also an important means to realize the manufacture of heterogeneous non-silicon microsystems [10].…”