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We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the resonance frequency of an inplane electrothermally heated straight resonator operated near the buckling point. The frequency shift is measured with optical sensing and the device is operating at atmospheric pressure. The magnetometer demonstrates a sensitivity (S) of 33.9/T, which is very high compared to the state of the art. In addition, the micro-sensor shows a good linearity in wide range and low power consumption around 0.2 mW. The above performances make the proposed micro-sensor promising for various low-cost magnetic applications.

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