Crossover/Veering in V-Shaped MEMS Resonators

Alcheikh, Nouha; Ouakad, Hassen M.; Mbarek, Sofiane Ben; Younis, Mohammad I.

doi:10.1109/jmems.2021.3126551

Cited by 10 publications

(7 citation statements)

References 37 publications

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“…We note that the veering phenomenon may occur when one of the eigenvalues of the two beams approach each other as the excitation signal varies. This is a similar behavior to that presented in [ 21 , 22 , 34 , 39 ]. Then, they diverge away from each other as the control parameter leaves the zone.…”

Section: Resultssupporting

confidence: 88%

“…It is well acknowledged that there are abundant nonlinear phenomena in MEMS while extending the micro-devices driving forces into the nonlinear regimes [ 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. Essentially, a large excitation will significantly increase the vibration amplitude and thus improve the performance of such devices [ 32 , 33 , 34 ].…”

Section: Introductionmentioning

confidence: 99%

“…Nevertheless, and despite the challenging concerns coming from the nonlinear behavior, electrostatically actuated MEMS resonators have been utilized as sensors mainly utilizing the resonance frequency shift to measure forces, accelerations and masses [ 20 , 25 ]. To this extent, a new generation of MEMS based sensors using the phenomenon of mode localization (confinement of vibration) has emerged in the past decade, demonstrating rich and complex interesting nonlinear modal interaction behaviors, such as mode crossing and mode veering [ 34 ]. This mainly happens when two frequencies of a system are equal in magnitude or become very close to each other, respectively.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

Alneamy

Ouakad

2022

Micromachines

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With the constant need for the development of smart devices, Micro-Electro-Mechanical Systems (MEMS) based smart sensors have been developed to detect hazard materials, micro-particles or even toxic substances. Identifying small particles using such micro-engineering technology requires designing sensors with high sensitivity, selectivity and ease of integration with other electronic components. Nevertheless, the available detection mechanism designs are still juvenile and need more innovative ideas to be even more competitive. Therefore, this work aims to introduce a novel, smart and innovative micro-sensor design consisting of two weakly electrostatically coupled microbeams (both serving as sensors) and electrically excited using a stationary electrode assuming a dc/ac electric signal. The sensor design can be tuned from straight to eventually initially curved microbeams. Such an arrangement would develop certain nonlinear phenomena, such as the snap-through motion. This behavior would portray certain mode veering/mode crossing and ultimately mode localization and it would certainly lead in increasing the sensitivity of the mode-localized based sensing mechanism. These can be achieved by tracking the change in the resonance frequencies of the two microbeams as the coupling control parameter is varied. To this extent, a nonlinear model of the design is presented, and then a reduced-order model considering all geometric and electrical nonlinearities is established. A Long-Time Integration (LTI) method is utilized to solve the static and dynamics of the coupled resonators under primary lower-order and higher-order resonances, respectively. It is shown that the system can display veering and mode coupling in the vicinity of the primary resonances of both beams. Such detected modal interactions lead to an increase in the sensitivity of the sensor design. In addition, the use of two different beam’s configurations in one device uncovered a possibility of using this design in detecting two potential substances at the same time using the two interacting resonant peaks.

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Section: Resultssupporting

confidence: 88%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

Alneamy

Ouakad

2022

Micromachines

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“…Furthermore, a distinct and rapidly advancing research domain involves investigating the nonlinear statics and dynamics of macro-and micromechanical structures featuring geometric perturbations exposed to electric fields of varying configurations. More specifically, numerous studies delve into topics like branching, bifurcations, the disruption of equilibrium positions, and the transition between different operating modes for microbeams exhibiting initial curvature [21][22][23][24][25][26]. Extensive research efforts also focus on exploring the spectral properties and nonlinear dynamic characteristics of such structures [27][28][29][30][31][32].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Alneamy,

Ouakad

2024

Mathematics

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The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes.

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“…A grand scheme of these sensors is the MEMS-based sensor that employs the phenomenon of mode localization. The latter introduces linear modal interaction behaviours, especially mode crossing and mode veering [22], which show great potential for sensitivity improvement. These modal interactions typically happen as the two modal frequencies of the system approach each other.…”

Section: Introductionmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

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A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

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Crossover/Veering in V-Shaped MEMS Resonators

Cited by 10 publications

References 37 publications

Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

Investigation into Mode Localization of Electrostatically Coupled Shallow Microbeams for Potential Sensing Applications

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

A multi-sensing scheme based on nonlinear coupled micromachined resonators

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