A Highly-Sensitive Pressure Sensor Based on Percolative Nanoparticle Arrays Formed by Dewetting Effect

Cai, Min-Xian; Chang, Jae Yoon; Wang, Weiyi; Chiu, Ying-Hsuan; Yang, Yao‐Joe

doi:10.1109/mems51670.2022.9699534

Cited by 2 publications

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“…The main structure of the proposed device was fabricated using micromachining techniques. The silver NPA on the electrode pairs was realized by applying the dewetting process on a silver thin film [ 33 ]. In general, an as-deposited metallic thin film is not stable, and therefore tends to agglomerate to form arrays of isolated islands when heated.…”

Section: Methodsmentioning

confidence: 99%

Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity

et al. 2022

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This work reports on an innovative dewetting process of silver thin films to realize percolative nanoparticle arrays (NPAs) and demonstrates its application on highly sensitive pressure sensors. The dewetting process, which is a simple and promising technique, synthesizes NPAs by breaking the as-deposited metal film into randomly distributed islands. The NPA properties, such as the mean particle size and the spacing between adjacent particles, can be easily tailored by controlling the dewetting temperature, as well as the as-deposited metal-film thickness. The fabricated NPAs were employed to develop gauge pressure sensors with high sensitivity. The proposed sensor consists of a sealed reference-pressure cavity, a polyimide (PI) membrane patterned with an interdigital electrode pair (IEP), and a silver NPA deposited on the IEP and the PI membrane. The operational principle of the device is based on the NPA percolation effect with deformation-dependence. The fabricated sensors exhibit rapid responses and excellent linearity at around 1 atm. The maximum sensitivity is about 0.1 kPa−1. The advantages of the proposed devices include ultrahigh sensitivity, a reduced thermal disturbance, and a decreased power consumption. A practical application of this pressure sensor with high resolution was demonstrated by using it to measure the relative floor height of a building.

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Section: Methodsmentioning

confidence: 99%

Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity

et al. 2022

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“…Finally, attempts based on metal piezoresistors are also ongoing. Pt strain gauge [ 87 ], nichrome alloy (Ni 80 Cr 20 ) [ 85 ], and silver nanoparticle array [ 90 ] have proven their piezoresistivity. However, the GF of metal gauges is not as excellent as other materials.…”

Section: Contributions Of New Materialsmentioning

confidence: 99%

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

Liu¹,

Jiang

Yang³

et al. 2023

Micromachines

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The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful measuring platform owing to its simple operational principle, favorable sensitivity and accuracy, mature fabrication, and low cost. Structural engineering in the sensing diaphragm and piezoresistor serves as a core issue in the construction of the micropressure sensor and undertakes the task of promoting the overall performance for the device. This paper focuses on the representative structural engineering in the development of the piezoresistive micropressure sensor, largely concerning the trade-off between measurement sensitivity and nonlinearity. Functional elements on the top and bottom layers of the diaphragm are summarized, and the influences of the shapes and arrangements of the piezoresistors are also discussed. The addition of new materials endows the research with possible solutions for applications in harsh environments. A prediction for future tends is presented, including emerging advances in materials science and micromachining techniques that will help the sensor become a stronger participant for the upcoming sensor epoch.

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A Highly-Sensitive Pressure Sensor Based on Percolative Nanoparticle Arrays Formed by Dewetting Effect

Cited by 2 publications

References 20 publications

Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity

Dewetting Process of Silver Thin Films and Its Application on Percolative Pressure Sensors with High Sensitivity

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

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