2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) 2022
DOI: 10.1109/marss55884.2022.9870493
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A Hybrid Nanorobotic Manipulation Platform: A Sharing Holder between a Cs-TEM and an SEM for Micro to Sub-nanometer Fabrication

Wenqi Zhang
1
,
Donglei Chen
2
,
Chaojian Hou
3
et al.
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