A hydrodynamic suspension polishing method for ultrasmooth and low-damage surface

Wen, Desheng; Zhong-yu, Piao; Zhang, Taihua

doi:10.1016/j.precisioneng.2016.05.008

Cited by 8 publications

(1 citation statement)

References 16 publications

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“…However, during the actual processing phase, the final material removal will also be impacted by the collisions of the nanoparticle with the workpiece and the polishing wheel, so these factors must be considered when constructing the material removal model. D. Wen et al employed computational fluid dynamics (CFD) to investigate the impact of the polishing disc's rotation on the abrasive particle velocity and collision angle [71]. Based on this, the researchers integrated particle contact mechanics, rough surface fractal theory, computational fluid mechanics, and an erosion process to create a material removal model of fused silica glass deformation and cutting wear [72].…”

Section: Elastic Emission Machiningmentioning

confidence: 99%

A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components

Li,

Xin,

Fan

et al. 2024

Micromachines

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Advancements in astronomical telescopes and cutting-edge technologies, including deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography, have escalated demands and imposed stringent surface quality requirements on optical system components. Achieving near-ideal optical components requires ultra-smooth surfaces with sub-nanometer roughness, no sub-surface damage, minimal surface defects, low residual stresses, and intact lattice integrity. This necessity has driven the rapid development and diversification of ultra-smooth surface fabrication technologies. This paper summarizes recent advances in ultra-smooth surface processing technologies, categorized by their material removal mechanisms. A subsequent comparative analysis evaluates the roughness and polishing characteristics of ultra-smooth surfaces processed on various materials, including fused silica, monocrystalline silicon, silicon carbide, and sapphire. To maximize each process’s advantages and achieve higher-quality surfaces, the paper discusses tailored processing methods and iterations for different materials. Finally, the paper anticipates future development trends in response to current challenges in ultra-smooth surface processing technology, providing a systematic reference for the study of the production of large-sized freeform surfaces.

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Section: Elastic Emission Machiningmentioning

confidence: 99%